公开(公告)号：US20240035810A1

公开(公告)日：2024-02-01

申请号：US17878415

申请日：2022-08-01

Applicant: KLA Corporation

Inventor： Amnon Manassen ,  Yoav Grauer ,  Shlomo Eisenbach ,  Stephen Hiebert ,  Avner Safrani ,  Roel Gronheid

IPC: G01B11/24 ,  G01B17/06 ,  G01B11/06 ,  G01N21/95

CPC classification number: G01B11/2441 ,  G01B17/06 ,  G01B11/0608 ,  G01N21/9505

Abstract: Systems and methods for generating volumetric data are disclosed. Such systems and methods may include scanning a sample at a plurality of focal planes located along a depth direction of the sample. Such systems and methods may include generating, via a detector of a metrology sub-system, a plurality of images of a volumetric field of view of the sample at the plurality of focal planes. Such systems and methods may include aggregating the plurality of images to generate volumetric data of the volumetric field of view of the sample. The metrology sub-system may include a Linnik interferometer.