公开(公告)号：US11426880B2

公开(公告)日：2022-08-30

申请号：US16682600

申请日：2019-11-13

Applicant: KLA Corporation

Inventor： Mark Lin ,  Ben Clarke

IPC: B25J15/00 ,  B25J15/06 ,  B25J15/12

Abstract: A gripper assembly is disclosed. The gripper assembly includes a stage, a mounting platform, and a plurality of the flexible gripper elements. The flexible gripper element is configured to grip an object. The flexible gripper elements are supported by a first end piece, where the first end piece is attached to the mounting platform. The mounting platform is connected to the stage, where the stage is moveable. The flexible gripper element includes a hollow section that is selectively pressurizable. The hollow section includes one or more zones, where each zone includes chambers which are pressurizable by a fluid input. The selective pressurization of the hollow section allows the flexible gripper element to grip the object.

公开(公告)号：US20200156261A1

公开(公告)日：2020-05-21

申请号：US16682600

申请日：2019-11-13

Applicant: KLA Corporation

Inventor： Mark Lin ,  Ben Clarke

IPC: B25J15/00 ,  B25J15/12 ,  B25J15/06

Abstract: A gripper assembly is disclosed. The gripper assembly includes a stage, a mounting platform, and a plurality of the flexible gripper elements. The flexible gripper element is configured to grip an object. The flexible gripper elements are supported by a first end piece, where the first end piece is attached to the mounting platform. The mounting platform is connected to the stage, where the stage is moveable. The flexible gripper element includes a hollow section that is selectively pressurizable. The hollow section includes one or more zones, where each zone includes chambers which are pressurizable by a fluid input. The selective pressurization of the hollow section allows the flexible gripper element to grip the object.