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公开(公告)号：US11415725B2
公开(公告)日：2022-08-16
申请号：US17175141
申请日：2021-02-12
申请人： KLA Corporation
发明人： Ivan Maleev , Donald Pettibone
摘要： An optical system for controlling polarization may include an illumination source to illuminate a surface of a sample, a set of collection optics to collect illumination from the surface of a sample, and a wave plate having a spatially-varying surface profile along a thickness direction positioned at a pupil plane of the set of collection optics, where the spatially-varying surface profile of the wave plate is configured to control polarization rotation as a continuous function of transverse position, and where the spatially-varying surface profile is selected to rotate light scattered from a surface of a sample to a selected polarization angle. The system may further include a linear polarizer oriented to block light with the selected polarization angle, and a sensor to detect illumination transmitted through the linear polarizer.
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公开(公告)号：US20210173122A1
公开(公告)日：2021-06-10
申请号：US17175141
申请日：2021-02-12
申请人： KLA Corporation
发明人： Ivan Maleev , Donald Pettibone
摘要： An optical system for controlling polarization may include an illumination source to illuminate a surface of a sample, a set of collection optics to collect illumination from the surface of a sample, and a wave plate having a spatially-varying surface profile along a thickness direction positioned at a pupil plane of the set of collection optics, where the spatially-varying surface profile of the wave plate is configured to control polarization rotation as a continuous function of transverse position, and where the spatially-varying surface profile is selected to rotate light scattered from a surface of a sample to a selected polarization angle. The system may further include a linear polarizer oriented to block light with the selected polarization angle, and a sensor to detect illumination transmitted through the linear polarizer.
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