公开(公告)号：US20230326728A1

公开(公告)日：2023-10-12

申请号：US17873114

申请日：2022-07-25

申请人： KLA Corporation

发明人： Paul Donders ,  Derek Mackay

IPC分类号： H01J43/18

CPC分类号： H01J43/18

摘要： The effective quantum efficiency of a metal-channel photomultiplier tube can be increased with an optical system. The optical system can direct incident light from areas of low efficiency on the cathode of the metal-channel photomultiplier tube instead to areas of high efficiency on the cathode. These high-efficiency areas of the cathode can correspond to a position between the dynode structure.

公开(公告)号：US20210104388A1

公开(公告)日：2021-04-08

申请号：US17031327

申请日：2020-09-24

申请人： KLA Corporation

发明人： Derek Mackay

IPC分类号： H01J43/30 ,  H01J43/08 ,  H01J43/18 ,  H01J43/12 ,  G06T5/00 ,  G06T5/50 ,  G01N21/95 ,  G01N21/88

摘要： A photomultiplier tube (PMT) detector assembly includes a PMT and an analog PMT detector circuit. The PMT includes a photocathode configured to emit an initial set of photoelectrons in response to an absorption of photons. The PMT includes a dynode chain with a plurality of dynodes. The dynode chain is configured to receive the initial set of photoelectrons, generate at least one amplified set of photoelectrons, and direct the at least one amplified set of photoelectrons. The PMT includes an anode configured to receive the at least one amplified set of photoelectrons, with a digitized image being generated based on a measurement of the final amplified set of photoelectrons. The digitized image is corrected by applying an output of the signal measured by the analog PMT detector circuit to the digitized image.

公开(公告)号：US11361951B2

公开(公告)日：2022-06-14

申请号：US17031327

申请日：2020-09-24

申请人： KLA Corporation

发明人： Derek Mackay

IPC分类号： H01J43/30 ,  H01J43/08 ,  H01J43/18 ,  H01J43/12 ,  G06T5/00 ,  G01N21/95 ,  G01N21/88 ,  G06T5/50

摘要： A photomultiplier tube (PMT) detector assembly includes a PMT and an analog PMT detector circuit. The PMT includes a photocathode configured to emit an initial set of photoelectrons in response to an absorption of photons. The PMT includes a dynode chain with a plurality of dynodes. The dynode chain is configured to receive the initial set of photoelectrons, generate at least one amplified set of photoelectrons, and direct the at least one amplified set of photoelectrons. The PMT includes an anode configured to receive the at least one amplified set of photoelectrons, with a digitized image being generated based on a measurement of the final amplified set of photoelectrons. The digitized image is corrected by applying an output of the signal measured by the analog PMT detector circuit to the digitized image.