公开(公告)号：US20230119169A1

公开(公告)日：2023-04-20

申请号：US18087395

申请日：2022-12-22

Applicant: KLA Corporation

Inventor： Mor Azarya ,  Michael D. Brain ,  Ami Appelbaum ,  Shai Mark ,  Arie Hoffman

IPC: H01L21/66 ,  H01L21/67 ,  G05B19/418

Abstract: A system for monitoring one or more conditions of an automation system of a semiconductor factory includes one or more instrumented substrates, one or more sealable containers and one or more system servers. The one or more instrumented substrates include one or more sensors. The one or more sensors measure one or more conditions of the one or more instrumented substrates as the one or more sealable containers transport the one or more instrumented substrates through the semiconductor factory. The one or more sealable containers also receive sensor data from the one or more sensors included on the one or more instrumented substrates. The one or more system servers are configured to receive the sensor data from the one or more sealable containers. The one or more servers are configured to identify one or more deviations in the measured one or more conditions.