公开(公告)号：US10527482B2

公开(公告)日：2020-01-07

申请号：US15536666

申请日：2015-12-17

申请人： KARLSRUHER INSTITUT FUER TECHNOLOGIE

发明人： Hanns-Rudolf Paur ,  Sonja Muelhopt ,  Christoph Schlager

IPC分类号： G01G7/06 ,  G01N1/22 ,  G01N15/06 ,  B01L99/00 ,  H01L41/04 ,  G01N15/00 ,  G01N5/02

摘要： A device for measuring superfine particles masses includes an exposure system with at least two measurement chambers having an identical geometry. Each measurement chamber has a deposition surface for the superfine particles which each have an aerosol feed line. The aerosol feed line has an outlet region to feed an aerosol onto the deposition surface, a means for generating a potential difference between the superfine particles in the aerosol and the deposition surface, and a grid arranged above the deposition surface. The outlet region has a widened outlet cross section having a constant distance from the deposition surface. At least one deposition surface is arranged on a piezoelectric crystal as a superfine balance. A first potential corresponding to a ground potential is present at each deposition surface. A second potential having a potential difference of at least 200 V in relation to the first potential is present at each grid.