公开(公告)号：US07679067B2

公开(公告)日：2010-03-16

申请号：US11441219

申请日：2006-05-26

Applicant: Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

Inventor： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

IPC: H01J3/26

CPC classification number: G01D5/34 ,  H01J25/00

Abstract: A multi-frequency receiver for receiving plural frequencies of electromagnetic radiation (e.g., light) using a beam of charged particles shared between plural resonant structures. The direction of the beam of charged particles is selectively controlled by at least one deflector. The beam of charged particles passing near the resonant structure is altered on at least one characteristic as a result the presence of the electric field induced on the corresponding resonant structure. Alterations in the beam of charged particles are thus correlated to data values encoded by the electromagnetic radiation.

Abstract translation: 一种多频接收器，用于使用在多个谐振结构之间共享的带电粒子束来接收多个电磁辐射频率（例如光）。 带电粒子束的方向由至少一个偏转器选择性地控制。 通过谐振结构附近的带电粒子束在至少一个特性上被改变，结果是在相应的谐振结构上感应出的电场的存在。 因此，带电粒子束中的变化与由电磁辐射编码的数据值相关。

公开(公告)号：US20080083881A1

公开(公告)日：2008-04-10

申请号：US11798554

申请日：2007-05-15

Applicant: Jonathan Gorrell ,  Jean Tokarz ,  Michael Maines ,  Mark Davidson

Inventor： Jonathan Gorrell ,  Jean Tokarz ,  Michael Maines ,  Mark Davidson

IPC: H01J3/26

CPC classification number: G02B6/1226 ,  B82Y20/00 ,  H01J25/00

Abstract: Nanoantennas are formed on a substrate (e.g., silicon) and generate light via interactions with a charged particle beam, where the frequency of the generated light is based in large part on the periodicity of the “fingers” that make up the nanoantennas. Each finger has typical dimensions of less than 100 nm on the shorter side and typically less than 500 nm on the longer, but the size of the optimal longer side is determined by the electron velocity. The charged particle may be an electron beam or any other source of charged particles. By utilizing fine-line lithography on the surface of the substrate, the nanoantennas can be formed without the need for complicated silicon devices.

Abstract translation: 纳米天线形成在基底（例如硅）上，并且通过与带电粒子束的相互作用产生光，其中所产生的光的频率大部分基于构成纳米天线的“手指”的周期性。 每个手指在较短的侧面具有小于100nm的典型尺寸，并且通常在较长的时间上通常小于500nm，但是最佳长边的尺寸由电子速度确定。 带电粒子可以是电子束或任何其他带电粒子源。 通过在基板的表面上利用细线光刻，可以形成纳米天线，而不需要复杂的硅器件。

公开(公告)号：US20070256472A1

公开(公告)日：2007-11-08

申请号：US11418081

申请日：2006-05-05

Applicant: Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz

Inventor： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz

IPC: G01V13/00

CPC classification number: G01N23/225 ,  H01J25/00 ,  H01J2237/2813

Abstract: Test apparatus for examining the operation and functioning of ultra-small resonant structures, and specifically using an SEM as the testing device and its electron beam as an exciting source of charged particles to cause the ultra-small resonant structures to resonate and produce EMR.

Abstract translation: 用于检查超小谐振结构的操作和功能的测试装置，并且具体使用SEM作为测试装置，并且其电子束作为带电粒子的激发源，以使超小谐振结构共振并产生EMR。

公开(公告)号：US20070235651A1

公开(公告)日：2007-10-11

申请号：US11400280

申请日：2006-04-10

Applicant: Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

Inventor： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

IPC: G01T1/20

CPC classification number: G21K1/087 ,  H01J25/00

Abstract: An electronic receiver for decoding data encoded into light is described. The light is received at an ultra-small resonant structure. The resonant structure generates an electric field in response to the incident light. An electron beam passing near the resonant structure is altered on at least one characteristic as a result of the electric field. Data is encoded into the light by a characteristic that is seen in the electric field during resonance and therefore in the electron beam as it passes the electric field. Alterations in the electron beam are thus correlated to data values encoded into the light.

Abstract translation: 描述了用于解码编码为光的数据的电子接收器。 光以超小的谐振结构被接收。 谐振结构响应于入射光而产生电场。 通过谐振结构附近的电子束由于电场而在至少一个特性上改变。 数据通过在谐振期间在电场中看到的特性并因此在电子束通过电场时在电子束中被编码成光。 因此，电子束中的变化与编码到光中的数据值相关。

公开(公告)号：US07573045B2

公开(公告)日：2009-08-11

申请号：US11798554

申请日：2007-05-15

Applicant: Jonathan Gorrell ,  Jean Tokarz ,  Michael E. Maines ,  Mark Davidson

Inventor： Jonathan Gorrell ,  Jean Tokarz ,  Michael E. Maines ,  Mark Davidson

IPC: H01J3/30

CPC classification number: G02B6/1226 ,  B82Y20/00 ,  H01J25/00

Abstract: Nanoantennas are formed on a substrate (e.g., silicon) and generate light via interactions with a charged particle beam, where the frequency of the generated light is based in large part on the periodicity of the “fingers” that make up the nanoantennas. Each finger has typical dimensions of less than 100 nm on the shorter side and typically less than 500 nm on the longer, but the size of the optimal longer side is determined by the electron velocity. The charged particle may be an electron beam or any other source of charged particles. By utilizing fine-line lithography on the surface of the substrate, the nanoantennas can be formed without the need for complicated silicon devices.

Abstract translation: 纳米天线形成在基底（例如硅）上，并且通过与带电粒子束的相互作用产生光，其中所产生的光的频率大部分基于构成纳米天线的“手指”的周期性。 每个手指在较短的侧面具有小于100nm的典型尺寸，并且通常在较长的时间上通常小于500nm，但是最佳长边的尺寸由电子速度确定。 带电粒子可以是电子束或任何其他带电粒子源。 通过在基板的表面上利用细线光刻，可以形成纳米天线，而不需要复杂的硅器件。

公开(公告)号：US20070034518A1

公开(公告)日：2007-02-15

申请号：US11203407

申请日：2005-08-15

Applicant: Jonathan Gorrell ,  Mark Davidson ,  Andres Trucco ,  Jean Tokarz

Inventor： Jonathan Gorrell ,  Mark Davidson ,  Andres Trucco ,  Jean Tokarz

IPC: C25D5/02

CPC classification number: C25D5/18 ,  C25D5/022

Abstract: We describe a process to produce ultra-small structures of between ones of nanometers to hundreds of micrometers in size, in which the structures are compact, nonporous and exhibit smooth vertical surfaces. Such processing is accomplished with pulsed electroplating techniques using ultra-short pulses in a controlled and predictable manner.

Abstract translation: 我们描述了一种制造尺寸为纳米至数百微米之间的超小结构的方法，其中结构是紧凑的，无孔的并且呈现平滑的垂直表面。 使用脉冲电镀技术以受控和可预测的方式使用超短脉冲来实现这种处理。

公开(公告)号：US20060035173A1

公开(公告)日：2006-02-16

申请号：US10917511

申请日：2004-08-13

Applicant: Mark Davidson ,  Jean Tokarz ,  Jonathan Gorrell

Inventor： Mark Davidson ,  Jean Tokarz ,  Jonathan Gorrell

IPC: G03F7/36

CPC classification number: H01L21/32136 ,  H01L21/32139

Abstract: We describe a new method for etching patterns in silver, copper, or gold, or other plate metal thin films. A pattern of a hard mask is placed onto the surface of the thin film, followed by a step of reactive ion etching using a plasma formed using a gas feed of some combination of some amounts of methane (CH4) and hydrogen (H2), and some or no amount of Argon (Ar). The areas of silver, copper or gold not covered by the hard mask are etched while the hard mask protects those areas that will form the raised portions of thin film in the final structure.

Abstract translation: 我们描述了一种蚀刻银，铜或金或其他板金属薄膜图案的新方法。 将硬掩模的图案放置在薄膜的表面上，然后使用使用一些组合的一些量的甲烷（CH 3 SO 4）的气体进料形成的等离子体进行反应离子蚀刻的步骤 ）和氢（H 2 H 2），以及一些或不含氩量（Ar）。 蚀刻没有被硬掩模覆盖的银，铜或金的区域，而硬掩模保护在最终结构中将形成薄膜的凸起部分的那些区域。

公开(公告)号：US07758739B2

公开(公告)日：2010-07-20

申请号：US11433486

申请日：2006-05-15

Applicant: Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Michael E. Maines ,  Andres Trucco ,  Paul Hart

Inventor： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Michael E. Maines ,  Andres Trucco ,  Paul Hart

IPC: H01L21/461 ,  H01L21/302

CPC classification number: H01S3/09 ,  B82Y20/00 ,  H01L21/32136 ,  H01L21/32139 ,  H01S3/0903 ,  Y10S977/949 ,  Y10S977/95 ,  Y10S977/954

Abstract: We describe an ultra-small structure and a method of producing the same. The structures produce visible light of varying frequency, from a single metallic layer. In one example, a row of metallic posts are etched or plated on a substrate according to a particular geometry. When a charged particle beam passed close by the row of posts, the posts and cavities between them cooperate to resonate and produce radiation in the visible spectrum (or even higher). A plurality of such rows of different geometries are formed by either etching or plating from a single metal layer such that the charged particle beam will yield different visible light frequencies (i.e., different colors) using different ones of the rows.

Abstract translation: 我们描述一种超小结构及其制造方法。 该结构从单个金属层产生变化​​频率的可见光。 在一个示例中，根据特定几何形状，一排金属柱被蚀刻或镀在基板上。 当带电粒子束通过柱的一列通过时，它们之间的柱和腔合作以共振并产生可见光谱（甚至更高）中的辐射。 通过从单个金属层进行蚀刻或电镀形成多个不同几何形状的行，使得带电粒子束将使用不同的行产生不同的可见光频率（即，不同的颜色）。

公开(公告)号：US07436177B2

公开(公告)日：2008-10-14

申请号：US11418081

申请日：2006-05-05

Applicant: Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz

Inventor： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz

IPC: H01J25/50

CPC classification number: G01N23/225 ,  H01J25/00 ,  H01J2237/2813

Abstract: Test apparatus for examining the operation and functioning of ultra-small resonant structures, and specifically using an SEM as the testing device and its electron beam as an exciting source of charged particles to cause the ultra-small resonant structures to resonate and produce EMR.

Abstract translation: 用于检查超小谐振结构的操作和功能的测试装置，并且具体使用SEM作为测试装置，并且其电子束作为带电粒子的激发源，以使超小谐振结构共振并产生EMR。

公开(公告)号：US20070258690A1

公开(公告)日：2007-11-08

申请号：US11418244

申请日：2006-05-05

Applicant: Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

Inventor： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

IPC: G02B6/10

CPC classification number: G02B6/1226 ,  B82Y20/00 ,  G02B6/4202

Abstract: A device includes an integrated circuit (IC) and at least one ultra-small resonant structure and a detection mechanism are formed on said IC. At least the ultra-small resonant structure portion of the device is vacuum packaged. The ultra-small resonant structure includes a plasmon detector having a transmission line. The detector mechanism includes a generator mechanism constructed and adapted to generate a beam of charged particles along a path adjacent to the transmission line; and a detector microcircuit disposed along said path, at a location after said beam has gone past said line, wherein the generator mechanism and the detector microcircuit are disposed adjacent transmission line and wherein a beam of charged particles from the generator mechanism to the detector microcircuit electrically couples a plasmon wave traveling along the metal transmission line to the microcircuit. The detector mechanism may be electrically connected to the underlying IC.

Abstract translation: 一种器件包括集成电路（IC），并且至少一个超小型谐振结构和检测机构形成在所述IC上。 至少装置的超小型谐振结构部分被真空包装。 超小型谐振结构包括具有传输线的等离子体检测器。 检测器机构包括一个发生器机构，其被构造和适于沿着与传输线相邻的路径产生带电粒子束; 以及沿着所述路径设置在所述光束已经经过所述线之后的位置处的检测器微电路，其中所述发生器机构和所述检测器微电路邻近传输线设置，并且其中从发生器机构到所述检测器微电路的带电粒子束电 将沿着金属传输线行进的等离子体波耦合到微电路。 检测器机构可以电连接到底层IC。