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    Process for fabricating MEMS devices
    1.
    发明授权
    Process for fabricating MEMS devices 有权
    制造MEMS器件的工艺

    公开(公告)号：US08691099B2

    公开(公告)日：2014-04-08

    申请号：US12930840

    申请日：2011-01-18

    申请人： John Gritters ,  Ezekiel John Joseph Kruglick ,  Mathew Last

    发明人： John Gritters ,  Ezekiel John Joseph Kruglick ,  Mathew Last

    IPC分类号： C23F1/00

    CPC分类号： G02B26/0841 ,  B81B2201/025 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  B81C1/00182 ,  G02B26/101 ,  H02N1/006

    摘要： A process for fabricating a MEMS device with movable comb teeth and stationary comb teeth. A single mask is used to define, during a series of processing steps, the location and width of both movable comb teeth and stationary comb teeth so as to assure self alignment of the comb teeth. MEMS devices are fabricated from a single multi-layer semi-conductor structure of semiconductor material and insulator material. In a preferred embodiment the process is employed to provide a MEMS mirror device having a movable structure, a movable frame, a first set of two torsional members, a first set of at least four comb drives, an outer fixed frame structure, a second set of two torsional members, and a second set of at least four comb drives.

    摘要翻译： 一种用于制造具有可移动梳齿和固定梳齿的MEMS装置的方法。 在一系列处理步骤中，使用单个掩模来限定可移动梳齿和固定梳齿的位置和宽度，以确保梳齿的自对准。 MEMS器件由半导体材料和绝缘体材料的单个多层半导体结构制成。 在优选实施例中，该方法用于提供具有可移动结构的MEMS反射镜装置，可移动框架，第一组两个扭转构件，第一组至少四个梳状驱动器，外部固定框架结构，第二组 的两个扭转构件，以及第二组至少四个梳齿驱动器。

    Process for fabricating MEMS devices
    2.
    发明申请
    Process for fabricating MEMS devices 有权
    制造MEMS器件的工艺

    公开(公告)号：US20110136283A1

    公开(公告)日：2011-06-09

    申请号：US12930840

    申请日：2011-01-18

    申请人： John Gritters ,  Ezekiel John Joseph Kruglick ,  Mathew Last

    发明人： John Gritters ,  Ezekiel John Joseph Kruglick ,  Mathew Last

    IPC分类号： H01L21/02

    CPC分类号： G02B26/0841 ,  B81B2201/025 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  B81C1/00182 ,  G02B26/101 ,  H02N1/006

    摘要： A process for fabricating a MEMS device with movable comb teeth and stationary comb teeth. A single mask is used to define, during a series of processing steps, the location and width of both movable comb teeth and stationary comb teeth so as to assure self alignment of the comb teeth. MEMS devices are fabricated from a single multi-layer semi-conductor structure of semiconductor material and insulator material. In a preferred embodiment the process is employed to provide a MEMS mirror device having a movable structure, a movable frame, a first set of two torsional members, a first set of at least four comb drives, an outer fixed frame structure, a second set of two torsional members, and a second set of at least four comb drives.

    摘要翻译： 一种用于制造具有可移动梳齿和固定梳齿的MEMS装置的方法。 在一系列处理步骤中，使用单个掩模来限定可移动梳齿和固定梳齿的位置和宽度，以确保梳齿的自对准。 MEMS器件由半导体材料和绝缘体材料的单个多层半导体结构制成。 在优选实施例中，该方法用于提供具有可移动结构的MEMS反射镜装置，可移动框架，第一组两个扭转构件，第一组至少四个梳状驱动器，外部固定框架结构，第二组 的两个扭转构件，以及第二组至少四个梳齿驱动器。

    Extended Probe Tips
    4.
    发明申请
    Extended Probe Tips 失效
    扩展探头技巧

    公开(公告)号：US20070259456A1

    公开(公告)日：2007-11-08

    申请号：US11381274

    申请日：2006-05-02

    申请人： John Gritters

    发明人： John Gritters

    IPC分类号： H01L21/66

    CPC分类号： G01R3/00 ,  G01R1/06727 ,  G01R1/06738 ,  G01R1/07342

    摘要： Probe tips, methods for making probe tips, and method for using such probe trips are described. The probe tips can include a pedestal portion connected to a beam of a cantilever structure and a contact portion that can contact an electronic component that to be tested. The pedestal portion and contact portions can have a generally trapezoidal shape. The probe tips can also include a rectangular-shaped extension portion located between the base and contact portions. The probe tips can be made using a dual-etching process that creates the generally trapezoidal shape of the base and contact portions and the generally rectangular-shaped extension portion.

    摘要翻译： 介绍探针提示，探针提示的方法以及使用这种探针跳闸的方法。 探针尖端可以包括连接到悬臂结构的梁的基座部分和可以接触待测试的电子部件的接触部分。 基座部分和接触部分可以具有大致梯形的形状。 探针尖端还可以包括位于基部和接触部分之间的矩形延伸部分。 可以使用双蚀刻工艺制造探针尖端，该工艺产生基部和接触部分以及大致矩形延伸部分的大致梯形形状。

    Assembly with a detachable member
    5.
    发明申请
    Assembly with a detachable member 审中-公开
    装配有可拆卸的组件

    公开(公告)号：US20060132153A1

    公开(公告)日：2006-06-22

    申请号：US11021412

    申请日：2004-12-22

    申请人： John Gritters

    发明人： John Gritters

    IPC分类号： G01R31/02

    CPC分类号： G01R1/07342

    摘要： A structure is fabricated in a generally two-dimensional orientation. The structure includes a detachable member or members. The structure is assembled into a three-dimensional orientation. The detachable member or members are attached to another object and released from the structure.

    摘要翻译： 一种结构以一般二维取向制造。 该结构包括可拆卸的构件。 该结构被组装成三维取向。 可拆卸构件附接到另一物体并从结构释放。