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公开(公告)号：US20140000480A1
公开(公告)日：2014-01-02
申请号：US14014551
申请日：2013-08-30
发明人： Hyun Jae Kim , Kyung Ho Kim , Gun Hee Kim , Tae Hoon Jeong , Hyun Soo Shin , Won Jun Park , Yun Jung Choi , Ka Young Lee
IPC分类号： C23C6/00
CPC分类号： C23C6/00 , C23C18/08 , C23C18/1216 , C23C18/1254 , C23C30/00 , H01L21/02554 , H01L21/02565 , H01L21/02628
摘要： A method of fabricating a liquid for an oxide thin film is provided, which includes mixing at least two kinds of dispersoids selected from the group consisting of a Zinc compound, an Indium compound, a Gallium compound, a Tin compound and a Thallium compound, with dispersion media corresponding to the selected dispersoids to form a dispersion system, and stirring and aging the dispersion system at a predetermined temperature for a predetermined time, wherein a molar ratio of the Zinc compound to each of the Indium compound, Gallium compound, Tin compound and Thallium compound is 1:0.1 to 1:2. According to the present invention, the liquid for the oxide thin film may be fabricated by a sol-gel method making it capable of being implemented in mass production in a simple and low-cost manner as opposed to the conventional vacuum deposition method.
摘要翻译： 提供一种制造用于氧化物薄膜的液体的方法，其包括将选自锌化合物，铟化合物，镓化合物，锡化合物和铊化合物的至少两种分散体与 对应于所选择的分散体的分散介质以形成分散体系，并在预定温度下将分散体系搅拌并老化预定时间，其中锌化合物与铟化合物，镓化合物，锡化合物和 铊化合物为1:0.1至1:2。 根据本发明，用于氧化物薄膜的液体可以通过溶胶 - 凝胶法制造，使其能够以简单且低成本的方式与常规真空沉积方法相反地进行批量生产。
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公开(公告)号：US09353433B2
公开(公告)日：2016-05-31
申请号：US14014551
申请日：2013-08-30
发明人： Hyun Jae Kim , Kyung Ho Kim , Gun Hee Kim , Tae Hoon Jeong , Hyun Soo Shin , Won Jun Park , Yun Jung Choi , Ka Young Lee
CPC分类号： C23C6/00 , C23C18/08 , C23C18/1216 , C23C18/1254 , C23C30/00 , H01L21/02554 , H01L21/02565 , H01L21/02628
摘要： A method of fabricating a liquid for an oxide thin film is provided, which includes mixing at least two kinds of dispersoids selected from the group consisting of a Zinc compound, an Indium compound, a Gallium compound, a Tin compound and a Thallium compound, with dispersion media corresponding to the selected dispersoids to form a dispersion system, and stirring and aging the dispersion system at a predetermined temperature for a predetermined time, wherein a molar ratio of the Zinc compound to each of the Indium compound, Gallium compound, Tin compound and Thallium compound is 1:0.1 to 1:2. According to the present invention, the liquid for the oxide thin film may be fabricated by a sol-gel method making it capable of being implemented in mass production in a simple and low-cost manner as opposed to the conventional vacuum deposition method.
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