公开(公告)号：US20250157746A1

公开(公告)日：2025-05-15

申请号：US18404833

申请日：2024-01-04

Applicant: Industrial Technology Research Institute

Inventor： Hung-Hsin Shih ,  Kun-Ping Huang ,  Chi-Chang Hu ,  Da-Je Hsu ,  Chen-Wei Tai

IPC: H01G11/86 ,  C01B32/186 ,  C01B32/194 ,  C23C16/26 ,  C23C16/511 ,  C23C16/56 ,  H01G11/32

Abstract: A manufacturing method of an electrode of an energy storage element includes: providing a substrate into microwave plasma equipment; introducing a carrier gas and a carbon precursor gas into the microwave plasma equipment; forming multi-layer graphene walls on the substrate through microwave plasma chemical vapor deposition; and immersing the substrate containing the multi-layer graphene walls in an electrolyte solution to perform electrochemical activation treatment, so that ions in the electrolyte solution are intercalated between adjacent graphene walls. A volume ratio of the carrier gas to the carbon precursor gas is 1:10 to 10:1. An electrode of an energy storage element is also provided.