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公开(公告)号：US3484341A
公开(公告)日：1969-12-16
申请号：US3484341D
申请日：1966-09-07
Applicant: ITT
Inventor： DEVITT DOUGLAS J
IPC: H01L21/288 , H01L23/485 , H01L7/64 , C23B5/48
CPC classification number: H01L21/2885 , H01L23/485 , H01L2224/13 , Y10S148/02 , Y10S148/055
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