公开(公告)号：US20140166882A1

公开(公告)日：2014-06-19

申请号：US13720317

申请日：2012-12-19

Applicant: INSTITUT NATIONAL D'OPTIQUE

Inventor： Hassane OULACHGAR ,  Philip MAUSKOPF ,  Hubert JEROMINEK ,  Martin BOLDUC ,  Samir ILIAS ,  Christine ALAIN

IPC: G01J5/20

CPC classification number: G01J5/20 ,  G01J5/0834

Abstract: An uncooled microbolometer detector that includes a substrate, a platform held above the substrate by a support structure, at least one thermistor provided on the platform, and an optical absorber. The optical absorber includes at least one electrically conductive layer extending on the platform over and in thermal contact with the at least one thermistor and patterned to form a resonant structure defining an absorption spectrum of the uncooled microbolometer detector. The optical absorber is exposed to electromagnetic radiation and absorbs the electromagnetic radiation according to the absorption spectrum. A microbolometer array including a plurality of uncooled microbolometer detectors arranged in a two-dimensional array is also provided. Advantageously, these embodiments allow extending the absorption spectrum of conventional infrared uncooled microbolometer detectors to the terahertz region of the electromagnetic spectrum.

Abstract translation: 一种未冷却的微测热计检测器，包括基板，通过支撑结构保持在基板上方的平台，设置在平台上的至少一个热敏电阻和光吸收体。 所述光吸收器包括至少一个导电层，所述至少一个导电层在所述平台上延伸并且与所述至少一个热敏电阻热接触并被图案化以形成限定所述非制冷微伏热计检测器的吸收光谱的谐振结构。 光吸收器暴露于电磁辐射，并根据吸收光谱吸收电磁辐射。 还提供了包括以二维阵列布置的多个非冷却的微测热计检测器的微热辐射计阵列。 有利地，这些实施例允许将常规的红外线未冷却的微测热计检测器的吸收光谱扩展到电磁光谱的太赫兹区域。