公开(公告)号：US20240288310A1

公开(公告)日：2024-08-29

申请号：US18689981

申请日：2021-09-14

Applicant: INSTITUT NATIONAL D'OPTIQUE

Inventor： Hassane OULACHGAR ,  Christine ALAIN ,  Francis GENEREUX

IPC: G01J5/20 ,  G01J5/00 ,  G01J5/08 ,  G01J5/0802

CPC classification number: G01J5/20 ,  G01J5/0802 ,  G01J5/0884 ,  G01J2005/0077 ,  G01J2005/204

Abstract: A microbolometer pixel unit for detection of terahertz radiation includes a substrate, a thermistor structure, and an optical absorber structure. The thermistor structure includes a plurality of microbolometer pixels disposed on the substrate. Each pixel includes a thermistor platform suspended above the substrate, a thermistor support member holding the thermistor platform, and a thermistor disposed on the thermistor platform and having an electrical resistance that varies in accordance with a temperature of the thermistor. The optical absorber structure includes an absorber platform suspended above the thermistor structure, an absorber support member holding the absorber platform and including a plurality of support elements, each support element providing a thermal conduction path from the absorber platform to the thermistor platform of a respective one of the microbolometer pixels, and an optical absorber disposed on the absorber platform to absorb incoming terahertz radiation to generate heat to change the temperature of the thermistors.

公开(公告)号：US20140166882A1

公开(公告)日：2014-06-19

申请号：US13720317

申请日：2012-12-19

Applicant: INSTITUT NATIONAL D'OPTIQUE

Inventor： Hassane OULACHGAR ,  Philip MAUSKOPF ,  Hubert JEROMINEK ,  Martin BOLDUC ,  Samir ILIAS ,  Christine ALAIN

IPC: G01J5/20

CPC classification number: G01J5/20 ,  G01J5/0834

Abstract: An uncooled microbolometer detector that includes a substrate, a platform held above the substrate by a support structure, at least one thermistor provided on the platform, and an optical absorber. The optical absorber includes at least one electrically conductive layer extending on the platform over and in thermal contact with the at least one thermistor and patterned to form a resonant structure defining an absorption spectrum of the uncooled microbolometer detector. The optical absorber is exposed to electromagnetic radiation and absorbs the electromagnetic radiation according to the absorption spectrum. A microbolometer array including a plurality of uncooled microbolometer detectors arranged in a two-dimensional array is also provided. Advantageously, these embodiments allow extending the absorption spectrum of conventional infrared uncooled microbolometer detectors to the terahertz region of the electromagnetic spectrum.

Abstract translation: 一种未冷却的微测热计检测器，包括基板，通过支撑结构保持在基板上方的平台，设置在平台上的至少一个热敏电阻和光吸收体。 所述光吸收器包括至少一个导电层，所述至少一个导电层在所述平台上延伸并且与所述至少一个热敏电阻热接触并被图案化以形成限定所述非制冷微伏热计检测器的吸收光谱的谐振结构。 光吸收器暴露于电磁辐射，并根据吸收光谱吸收电磁辐射。 还提供了包括以二维阵列布置的多个非冷却的微测热计检测器的微热辐射计阵列。 有利地，这些实施例允许将常规的红外线未冷却的微测热计检测器的吸收光谱扩展到电磁光谱的太赫兹区域。

公开(公告)号：US20160178444A1

公开(公告)日：2016-06-23

申请号：US14573689

申请日：2014-12-17

Applicant: INSTITUT NATIONAL D'OPTIQUE

Inventor： Hassane OULACHGAR ,  Christine ALAIN

IPC: G01J5/20

CPC classification number: G01J5/20 ,  G01J3/36 ,  G01J3/42 ,  G01J5/024 ,  G01J5/0853 ,  G01J5/0862 ,  G01J2003/1213 ,  G01J2005/202

Abstract: An uncooled microbolometer pixel for detection of electromagnetic radiation is provided that includes a substrate, a thermistor assembly and an absorber assembly. The thermistor assembly includes a thermistor platform suspended above the substrate, one or more thermistors on the thermistor platform, and an electrode structure electrically connecting the thermistors to the substrate. The absorber assembly includes an optical absorber over the thermistor assembly and a reflector provided under and forming a resonant cavity with the optical absorber. The optical absorber is in thermal contact with the thermistors and exposed to the electromagnetic radiation. The optical absorber includes a set of elongated resonators determining an absorption spectrum of the optical absorber. An array of microbolometer pixels is also provided, in which the resonators of different pixels can have different lengths determining different absorption spectra, thereby enabling configurable broadband and/or multi-frequency detection, in particular in the terahertz region.

Abstract translation: 提供了一种用于检测电磁辐射的未冷却的微热辐射计像素，其包括基底，热敏电阻组件和吸收体组件。 热敏电阻组件包括悬置在衬底上的热敏电阻平台，热敏电阻平台上的一个或多个热敏电阻和将热敏电阻电连接到衬底的电极结构。 吸收器组件包括位于热敏电阻组件上的光吸收体，以及设置在光吸收体下面并与光吸收体形成谐振腔的反射器。 光吸收器与热敏电阻热接触并暴露于电磁辐射。 光吸收器包括确定光吸收体的吸收光谱的一组细长谐振器。 还提供了一组微热辐射计像素，其中不同像素的谐振器可以具有确定不同吸收光谱的不同长度，从而实现特别是在太赫兹区域中的可配置的宽带和/或多频检测。