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公开(公告)号:US11243161B1
公开(公告)日:2022-02-08
申请号:US16953493
申请日:2020-11-20
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Chin Lien , Cho-Fan Hsieh , Chia-Jen Lin , Yu-Tai Li , Wei-You Lin
IPC: G01N21/3504 , G01N21/3581
Abstract: A gas measurement device is provided and includes a gas channel module and a sensor component disposed within the gas channel module. The sensor component includes a substrate, a porous membrane, and a metal layer disposed between the substrate and the porous membrane. A gas measurement method is also provided.