公开(公告)号：US20140179053A1

公开(公告)日：2014-06-26

申请号：US14135929

申请日：2013-12-20

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Tsung-Shin Wu ,  Shih-Hsiung Wu ,  Chia-Wen Chang ,  Hung-Ru Hsu

IPC: H01L31/18

CPC classification number: H01L31/072 ,  C23C14/0021 ,  C23C14/0623 ,  C23C14/24 ,  H01L21/02557 ,  H01L21/02568 ,  H01L21/02631 ,  H01L31/0326 ,  Y02E10/50

Abstract: A method for fabricating an absorbing layer of a solar cell and a thermal treatment device thereof adapted for forming an absorbing layer on a substrate are disclosed. The method includes the following steps. First, a solid-phase vapor source in a chamber and an absorbing layer precursor on a substrate are maintained by a predetermined distance. The solid-phase vapor source contains tin. The absorbing layer precursor contains copper, zinc, tin and sulfur. The temperature inside the chamber is raised to a forming temperature, so that the absorbing layer precursor forms an absorbing layer on the substrate.

Abstract translation: 公开了一种用于制造太阳能电池的吸收层的方法及其适用于在衬底上形成吸收层的热处理装置。 该方法包括以下步骤。 首先，将室内的固相蒸气源和基板上的吸收层前体保持规定的距离。 固相蒸气源含有锡。 吸收层前体含有铜，锌，锡和硫。 室内的温度升高到成形温度，使得吸收层前体在衬底上形成吸收层。