公开(公告)号：US11579099B2

公开(公告)日：2023-02-14

申请号：US17037115

申请日：2020-09-29

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chun-Ting Liu ,  Wen-Li Wu ,  Bo-Ching He ,  Guo-Dung Chen ,  Sheng-Hsun Wu ,  Wei-En Fu

IPC: G01N23/20 ,  G01N23/20008 ,  G01N23/2206 ,  G01N23/223 ,  G01N23/2273

Abstract: This disclosure relates to an apparatus and methods for applying X-ray reflectometry (XRR) in characterizing three dimensional nanostructures supported on a flat substrate with a miniscule sampling area and a thickness in nanometers. In particular, this disclosure is targeted for addressing the difficulties encountered when XRR is applied to samples with intricate nanostructures along all three directions, e.g. arrays of nanostructured poles or shafts. Convergent X-ray with long wavelength, greater than that from a copper anode of 0.154 nm and less than twice of the characteristic dimensions along the film thickness direction, is preferably used with appropriate collimations on both incident and detection arms to enable the XRR for measurements of samples with limited sample area and scattering volumes.

公开(公告)号：US10352694B2

公开(公告)日：2019-07-16

申请号：US15652212

申请日：2017-07-17

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Guo-Dung Chen ,  Bo-Ching He ,  Wei-En Fu

IPC: G01B15/00 ,  G01N23/02 ,  G03F7/20

Abstract: A contactless dual-plane positioning method is disclosed. In this method, an X ray is provided. The X ray passes through a first test piece along a light incident axis. A scattering pattern generated by the X ray passing through the first test piece, and a scatting light intensity corresponding to the scattering pattern are obtained. According to the scattering light intensity, the first test piece is pivoted along a first axis or a second axis until the scattering intensity is greater than or equal to a predetermined intensity. At least three measurement distances between a second test piece and the first test piece are then obtained. According to the measurement distances, an included angle between the second test piece and the light incident axis is adjusted by pivoting the second test piece along a third axis or a fourth axis until the differences between any two measurement distances are less than a predetermined threshold value.

公开(公告)号：US20150330886A1

公开(公告)日：2015-11-19

申请号：US14631861

申请日：2015-02-26

Applicant: Industrial Technology Research Institute

Inventor： Hsin-Chia Ho ,  Guo-Dung Chen ,  Wei-En Fu ,  Yen-Liang Lin

IPC: G01N15/10 ,  G01N15/02 ,  B01F3/04

CPC classification number: G01N15/0266 ,  B01F3/04056 ,  B01F3/0861 ,  B01F5/0609 ,  B01F11/0071 ,  B01F15/00019 ,  B01F15/0238 ,  B01F2003/0896 ,  B01F2215/0037 ,  G01N1/28 ,  G01N1/38 ,  G01N15/0205 ,  G01N15/10 ,  G01N2015/0038 ,  G01N2015/1081 ,  G01N2015/1087

Abstract: An apparatus for mixing a solution includes first and second tanks, a sampling element, a flow control element, a mixing assembly, first and second air-intake systems, and first and second air-exhaust systems. The first tank has a first chamber. The second tank has a second chamber. The sampling element has an extraction port located in the first chamber. The flow control element connects and communicates with the first chamber. Two opposite ends of the mixing assembly connect and communicate with the first chamber and the second chamber, respectively. The first air-intake system and the first air-exhaust system connect and communicate with the first chamber. The second air-intake system and the second air-exhaust system connect and communicate with the second chamber.

Abstract translation: 用于混合溶液的装置包括第一和第二罐，取样元件，流量控制元件，混合组件，第一和第二进气系统以及第一和第二排气系统。 第一个坦克有一个第一个房间。 第二个坦克有一个第二个舱。 采样元件具有位于第一室中的抽出口。 流量控制元件与第一室连接并连通。 混合组件的两个相对端分别与第一腔室和第二腔室连接并连通。 第一进气系统和第一排气系统与第一室连接并连通。 第二进气系统和第二排气系统与第二室连接并连通。

公开(公告)号：US09625365B2

公开(公告)日：2017-04-18

申请号：US14631861

申请日：2015-02-26

Applicant: Industrial Technology Research Institute

Inventor： Hsin-Chia Ho ,  Guo-Dung Chen ,  Wei-En Fu ,  Yen-Liang Lin

IPC: G01N15/02 ,  G01N15/10 ,  B01F3/04 ,  B01F5/06 ,  B01F11/00 ,  B01F15/02 ,  G01N1/28 ,  G01N1/38 ,  G01N15/00

CPC classification number: G01N15/0266 ,  B01F3/04056 ,  B01F3/0861 ,  B01F5/0609 ,  B01F11/0071 ,  B01F15/00019 ,  B01F15/0238 ,  B01F2003/0896 ,  B01F2215/0037 ,  G01N1/28 ,  G01N1/38 ,  G01N15/0205 ,  G01N15/10 ,  G01N2015/0038 ,  G01N2015/1081 ,  G01N2015/1087

Abstract: An apparatus for mixing a solution includes first and second tanks, a sampling element, a flow control element, a mixing assembly, first and second air-intake systems, and first and second air-exhaust systems. The first tank has a first chamber. The second tank has a second chamber. The sampling element has an extraction port located in the first chamber. The flow control element connects and communicates with the first chamber. Two opposite ends of the mixing assembly connect and communicate with the first chamber and the second chamber, respectively. The first air-intake system and the first air-exhaust system connect and communicate with the first chamber. The second air-intake system and the second air-exhaust system connect and communicate with the second chamber.

公开(公告)号：US20170065941A1

公开(公告)日：2017-03-09

申请号：US15355040

申请日：2016-11-17

Applicant: Industrial Technology Research Institute

Inventor： Hsin-Chia Ho ,  Guo-Dung Chen ,  Wei-En Fu ,  Yen-Liang Lin

IPC: B01F3/08 ,  B01F11/00 ,  G01N1/38 ,  B01F15/00 ,  B01F3/04 ,  G01N15/02 ,  B01F5/06 ,  B01F15/02

CPC classification number: G01N15/0266 ,  B01F3/04056 ,  B01F3/0861 ,  B01F5/0609 ,  B01F11/0071 ,  B01F15/00019 ,  B01F15/0238 ,  B01F2003/0896 ,  B01F2215/0037 ,  G01N1/28 ,  G01N1/38 ,  G01N15/0205 ,  G01N15/10 ,  G01N2015/0038 ,  G01N2015/1081 ,  G01N2015/1087

Abstract: According to an embodiment of the disclosure, an apparatus for mixing a solution includes first and second tanks, a sampling element, a flow control element and a mixing assembly is provided. The first tank has a first chamber and a first fluid inlet. The second tank has a second chamber. The sampling element is connected and communicated with the first chamber. The flow control element connects and communicates with the first chamber through the first fluid inlet. Two opposite ends of the mixing assembly connect and communicate with the first chamber and the second chamber, respectively.

Abstract translation: 根据本公开的一个实施例，一种用于混合溶液的装置包括第一和第二罐，采样元件，流量控制元件和混合组件。 第一罐具有第一室和第一流体入口。 第二个坦克有一个第二个舱。 采样元件与第一室连接并连通。 流量控制元件通过第一流体入口连接并与第一室连通。 混合组件的两个相对端分别与第一腔室和第二腔室连接并连通。

公开(公告)号：US11867595B2

公开(公告)日：2024-01-09

申请号：US17532767

申请日：2021-11-22

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chun-Ting Liu ,  Wen-Li Wu ,  Bo-Ching He ,  Guo-Dung Chen ,  Sheng-Hsun Wu ,  Wei-En Fu

IPC: G01N23/20 ,  G01N23/20008

CPC classification number: G01N23/20 ,  G01N23/20008 ,  G01N2223/051 ,  G01N2223/052 ,  G01N2223/1003 ,  G01N2223/1016 ,  G01N2223/315 ,  G01N2223/611

Abstract: This disclosure relates to an apparatus and methods for applying X-ray reflectometry (XRR) in characterizing three dimensional nanostructures supported on a flat substrate with a miniscule sampling area and a thickness in nanometers. In particular, this disclosure is targeted for addressing the difficulties encountered when XRR is applied to samples with intricate nanostructures along all three directions, e.g. arrays of nanostructured poles or shafts. Convergent X-ray with long wavelength, greater than that from a copper anode of 0.154 nm and less than twice of the characteristic dimensions along the film thickness direction, is preferably used with appropriate collimations on both incident and detection arms to enable the XRR for measurements of samples with limited sample area and scattering volumes. In one embodiment, the incident angle of the long-wavelength focused X-ray is ≥24°, and the sample area is ≤25 μm×25 μm.

公开(公告)号：US11287253B2

公开(公告)日：2022-03-29

申请号：US16730236

申请日：2019-12-30

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chun-Ting Liu ,  Han-Yu Chang ,  Bo-Ching He ,  Guo-Dung Chen ,  Wen-Li Wu ,  Wei-En Fu

IPC: G01B15/02 ,  G01N23/223 ,  G01N23/2252

Abstract: The present disclosure relates to a device and a method for measuring a thickness of an ultrathin film on a solid substrate. The thickness of the target ultrathin film is measured from the intensity of the fluorescence converted by the substrate and leaking and tunneling through the target ultrathin film at low detection angle. The fluorescence generated from the substrate has sufficient and stable high intensity, and therefore can provide fluorescence signal strong enough to make the measurement performed rapidly and precisely. The detection angle is small, and therefore the noise ratio is low, and efficiency of thickness measurement according to the method disclosed herein is high. The thickness measurement method can be applied into In-line product measurement without using standard sample, and therefore the thickness of the product can be measured rapidly and efficiently.