公开(公告)号：US11078120B2

公开(公告)日：2021-08-03

申请号：US16096641

申请日：2017-04-26

申请人： IDEMITSU KOSAN CO., LTD.

发明人： Kazuyoshi Inoue ,  Futoshi Utsuno ,  Shigekazu Tomai ,  Masatoshi Shibata ,  Mami Itose

IPC分类号： H01L21/02 ,  C04B35/01 ,  C04B35/626 ,  C04B35/64 ,  C23C14/08 ,  C23C14/34 ,  H01L27/12 ,  H01L29/24 ,  H01L29/786

摘要： An oxide sintered body is characterized in that it comprises an oxide including an In element, a Zn element, a Sn element and a Y element and that a sintered body density is equal to or more than 100.00% of a theoretical density.