公开(公告)号：US20250023550A1

公开(公告)日：2025-01-16

申请号：US18901776

申请日：2024-09-30

Applicant: Huawei Technologies Co., Ltd.

Inventor： Fengpei Sun ,  Zhihong Feng ,  Jinghui Xu ,  Linhai Huang

IPC: H03H9/24

Abstract: A resonator includes a first sub-resonator and a plurality of second sub-resonators. The first sub-resonator in vibration deforms in at least two non-parallel directions. The first sub-resonator is connected to the second sub-resonators in all the at least two non-parallel directions, and deformations in all the at least two non-parallel directions couple the first sub-resonator to the second sub-resonators. Then, the resonator can balance a Q value and Rm, and can have a higher Q value and lower Rm.

公开(公告)号：US20220324699A1

公开(公告)日：2022-10-13

申请号：US17854668

申请日：2022-06-30

Applicant: HUAWEI TECHNOLOGIES CO., LTD.

Inventor： Fengpei Sun ,  Zhihong Feng ,  Jinghui Xu

IPC: B81B3/00 ,  G02B26/08 ,  B81C1/00

Abstract: Micro-electro-mechanical systems and a preparation method thereof are provided. The micro-electro-mechanical systems include first fixed comb fingers, second fixed comb fingers, a support beam, a movable platform, and movable comb fingers. The first fixed comb fingers and the second fixed comb fingers are fastened to a substrate, and the first fixed comb fingers are electrically isolated from the second fixed comb fingers. Two ends of the support beam are fastened to the substrate, and the movable platform is coupled to the support beam. The movable comb fingers are coupled to the movable platform, and form a three-layer comb finger structure with the first fixed comb fingers and the second fixed comb fingers. This structure improves drive efficiency of the micro-electro-mechanical systems.

公开(公告)号：US20240204693A1

公开(公告)日：2024-06-20

申请号：US18591610

申请日：2024-02-29

Applicant: Huawei Technologies Co., Ltd.

Inventor： Fengpei Sun ,  Zhihong Feng ,  Jinghui Xu ,  Xiaoshi Dong ,  Jianbo Sun

IPC: H02N1/00 ,  G02B26/08

CPC classification number: H02N1/002 ,  G02B26/0833

Abstract: An actuating member and a related device are provided, and may be applied to an optical communication scenario such as OXC, VOA, or WSS, or the field of projection display. A first fastening structure (11), a second fastening structure (12), and a third fastening structure (13) are fastened to a substrate. A rotating frame (40) is connected to the first fastening structure (11) by using a first cantilever beam (21), and a first comb (31) is formed on the rotating frame (40). The first comb (31) is arranged in a staggered manner with a second comb (32), and the second comb (32) is formed on the second fastening structure (12). A rotating platform (60) is located at an inner side of the rotating frame (40), the rotating platform (60) is connected to the rotating frame (40) by using a second cantilever beam (22).

公开(公告)号：US20240019687A1

公开(公告)日：2024-01-18

申请号：US18477744

申请日：2023-09-29

Applicant: Huawei Technologies Co., Ltd.

Inventor： Xiaoshi Dong ,  Jinghui Xu ,  Fengpei Sun

IPC: G02B26/08 ,  B81B7/02

CPC classification number: G02B26/0841 ,  B81B7/02 ,  B81B2203/0136 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045

Abstract: An electrostatic MEMS micromirror is provided, and may be used in a device such as a mobile phone, a microphone, a camera, a radar, or an optical switch. The electrostatic MEMS micromirror includes a support beam, a micromirror, and a drive component. The drive component includes a comb frame and a drive comb located in the comb frame. The support beam and the micromirror are mechanically coupled using the comb frame. Two sides of the comb frame that are mechanically coupled to the micromirror are separately located on two sides of a rotating axis determined by the support beam. The drive comb includes at least one comb pair. The comb pair includes a movable comb structure and a stationary comb structure. The movable comb structure includes a plurality of movable combs. One end of the movable comb is fastened to the comb frame.