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公开(公告)号：US10186397B2
公开(公告)日：2019-01-22
申请号：US14538327
申请日：2014-11-11
发明人： John H. Price , Dravida Bock
摘要： An automated workpiece processing system including at least one workpiece processing unit, a workpiece holder configured to removably hold a batch of workpieces therein, each workpiece embodying workpiece identifying indicia where the workpiece identifying indicia is a physical representation of a sample held on a respective workpiece, and to interface with the at least one automated workpiece processing unit, and a controller including a memory having a data structure therein that effects, with the workpiece identifying indicia, batch process tracking of each workpiece in the batch of workpieces through the at least one automated workpiece processing unit in a predetermined batch workpiece processing sequence.
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公开(公告)号：US09601305B2
公开(公告)日：2017-03-21
申请号：US14538332
申请日：2014-11-11
发明人： John H. Price , Dravida Bock
CPC分类号： H01J37/20 , G01N1/32 , G01N35/00732 , H01J37/023 , H01J37/185 , H01J37/261 , H01J2237/2007 , H01J2237/201 , H01J2237/20278 , H01J2237/20285 , H01J2237/20292 , H01J2237/204 , H01J2237/26 , H01J2237/2602
摘要： An electron microscope specimen sample holder including a thin sheet base member with a first surface and an opposing second surface, the first surface defining a seat and support surface for a specimen holding film held by the sample holder, the base member including an aperture through the second surface exposing the holding film held by the sample holder, and including a grip engagement zone defined at least on part of the first surface arranged to engage a gripping device, and wherein at least one of the first or second surface has machine readable structures formed thereon arranged in patterns embodying data that defines at least one predetermined characteristic of the sample holder.
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公开(公告)号：US10361060B2
公开(公告)日：2019-07-23
申请号：US15254557
申请日：2016-09-01
发明人： John H. Price , Dravida Bock
摘要： An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a first shuttle stage, a second shuttle stage independent of the first stage, and an end effector connected to at least one of the first and second stages, the end effector being configured to hold and transport the workpiece into and out of the processing module, and having a range of motion, defined by a combination of the first and second stage, extending from a workpiece holding station outside the processing module to the processing location inside the processing module so the end effector defines a processing stage of the processing module, and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, and being communicably connected to the transport module.
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公开(公告)号：US09449785B2
公开(公告)日：2016-09-20
申请号：US14538391
申请日：2014-11-11
发明人： John H. Price , Dravida Bock
CPC分类号： H01J37/20 , G01N1/32 , G01N35/00732 , H01J37/023 , H01J37/185 , H01J37/261 , H01J2237/2007 , H01J2237/201 , H01J2237/20278 , H01J2237/20285 , H01J2237/20292 , H01J2237/204 , H01J2237/26 , H01J2237/2602
摘要： An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a first shuttle stage, a second shuttle stage independent of the first stage, and an end effector connected to at least one of the first and second stages, the end effector being configured to hold and transport the workpiece into and out of the processing module, and having a range of motion, defined by a combination of the first and second stage, extending from a workpiece holding station outside the processing module to the processing location inside the processing module so the end effector defines a processing stage of the processing module, and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, and being communicably connected to the transport module.
摘要翻译： 一种自动化工件处理装置，包括处理部分，其包括处理模块，所述处理模块被配置为在处理位置处理工件;传输模块，包括第一穿梭台，独立于所述第一阶段的第二梭动台，以及至少连接至少 第一和第二阶段中的一个，末端执行器被构造成保持和输送工件进出处理模块，并且具有由第一和第二平台的组合限定的运动范围，该范围从工件夹持 处理模块外部的处理站内的处理位置，使得末端执行器限定处理模块的处理阶段，以及自动装载和传送部分，其包括装载端口模块，通过该装载端口模块将工件装载到自动装载和传送部分中 并且可传输地连接到传送模块。
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公开(公告)号：US20150243473A1
公开(公告)日：2015-08-27
申请号：US14538391
申请日：2014-11-11
发明人： John H. Price , Dravida Bock
CPC分类号： H01J37/20 , G01N1/32 , G01N35/00732 , H01J37/023 , H01J37/185 , H01J37/261 , H01J2237/2007 , H01J2237/201 , H01J2237/20278 , H01J2237/20285 , H01J2237/20292 , H01J2237/204 , H01J2237/26 , H01J2237/2602
摘要： An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a first shuttle stage, a second shuttle stage independent of the first stage, and an end effector connected to at least one of the first and second stages, the end effector being configured to hold and transport the workpiece into and out of the processing module, and having a range of motion, defined by a combination of the first and second stage, extending from a workpiece holding station outside the processing module to the processing location inside the processing module so the end effector defines a processing stage of the processing module, and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, and being communicably connected to the transport module.
摘要翻译： 一种自动化工件处理装置，包括处理部分，其包括处理模块，所述处理模块被配置为在处理位置处理工件;传输模块，包括第一穿梭台，独立于所述第一阶段的第二梭动台，以及至少连接至少 第一和第二阶段中的一个，末端执行器被构造成保持和输送工件进出处理模块，并且具有由第一和第二平台的组合限定的运动范围，该范围从工件夹持 处理模块外部的处理站内的处理位置，使得末端执行器限定处理模块的处理阶段，以及自动装载和传送部分，其包括装载端口模块，通过该装载端口模块将工件装载到自动装载和传送部分中 并且可传输地连接到传送模块。
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