公开(公告)号：US11232927B2

公开(公告)日：2022-01-25

申请号：US16966103

申请日：2019-01-21

Applicant: Hitachi High-Tech Corporation

Inventor： Makoto Kuwahara ,  Koh Saitoh

IPC: H01J37/073 ,  H01J37/10 ,  H01J37/153 ,  H01J37/26

Abstract: The present invention is to generate a spatially phase modulated electron wave. A laser radiating apparatus, a spatial light phase modulator, and a photocathode are provided. The photocathode has a semiconductor film having an NEA film formed on a surface thereof, and a thickness of the semiconductor film is smaller than a value obtained by multiplying a coherent relaxation time of electrons in the semiconductor film by a moving speed of the electrons in the semiconductor film. According to the configuration, a spatial distribution of phase and a spatial distribution of intensity of spatial phase modulated light are transferred to an electron wave, and the electron wave emitted from an NEA film is modulated into the spatial distribution of phase and the spatial distribution of intensity of the light. Since the spatial distribution of phase of the light can be modulated as intended by a spatial phase modulation technique for light, it is possible to generate an electron wave having a spatial distribution of phase modulated as intended.

公开(公告)号：US11651930B2

公开(公告)日：2023-05-16

申请号：US17540442

申请日：2021-12-02

Applicant: Hitachi High-Tech Corporation

Inventor： Makoto Kuwahara ,  Koh Saitoh

IPC: H01J37/073 ,  H01J37/10 ,  H01J37/153 ,  H01J37/26 ,  H03F1/02 ,  H03F3/24 ,  H04B1/04 ,  H04L25/03 ,  H04L27/08 ,  H04L27/26 ,  H04L27/36 ,  H04W56/00 ,  H04W74/00 ,  H04W88/02 ,  H04W88/08

CPC classification number: H01J37/073 ,  H01J37/10 ,  H01J37/153 ,  H01J37/26 ,  H03F1/02 ,  H03F3/24 ,  H04B1/04 ,  H04L25/03012 ,  H04L25/03343 ,  H04L27/08 ,  H04L27/2647 ,  H04L27/368 ,  H04W56/0035 ,  H01J2237/1534 ,  H04B2001/045 ,  H04B2001/0408 ,  H04W74/004 ,  H04W74/006 ,  H04W88/02 ,  H04W88/08

Abstract: The present invention is to generate a spatially phase modulated electron wave. A laser radiating apparatus, a spatial light phase modulator, and a photocathode are provided. The photocathode has a semiconductor film having an NEA film formed on a surface thereof, and a thickness of the semiconductor film is smaller than a value obtained by multiplying a coherent relaxation time of electrons in the semiconductor film by a moving speed of the electrons in the semiconductor film. According to the configuration, a spatial distribution of phase and a spatial distribution of intensity of spatial phase modulated light are transferred to an electron wave, and the electron wave emitted from an NEA film is modulated into the spatial distribution of phase and the spatial distribution of intensity of the light. Since the spatial distribution of phase of the light can be modulated as intended by a spatial phase modulation technique for light, it is possible to generate an electron wave having a spatial distribution of phase modulated as intended.