公开(公告)号：US11348758B2

公开(公告)日：2022-05-31

申请号：US17287233

申请日：2019-02-05

Applicant: Hitachi High-Tech Corporation

Inventor： Anoru Suga ,  Shuhei Yabu ,  Kazuki Ishizawa ,  Michio Hatano

IPC: H01J37/248 ,  H01J1/13 ,  H01J37/06 ,  H01J37/24

Abstract: An objective of the present invention is to provide a charged particle beam device capable of estimating a lifetime of a filament of a charged particle beam source with a cheap and simple circuit configuration. The charged particle beam device according to the present invention includes a boosting circuit that boosts a voltage to be supplied to a filament and estimates a remaining duration of the filament using a measured value of a current flowing on a low-voltage side of the boosting circuit (see FIG. 3).