公开(公告)号：US12130178B2

公开(公告)日：2024-10-29

申请号：US17774405

申请日：2020-11-04

Applicant: Hitachi High-Tech Analytical Science GmbH

Inventor： André Peters ,  Rainer Simons

IPC: G01J3/18 ,  G01J3/02 ,  G01J3/36

CPC classification number: G01J3/0286 ,  G01J3/0291 ,  G01J3/18 ,  G01J3/36

Abstract: The invention relates to an optical emission spectrometer (1) being easily adjustable, and to a method (100) to set-up and operate such a spectrometer (1) comprising a plasma stand (2) to establish a light emitting plasma from sample material, and an optical system (3) to measure the spectrum of the light (L) emitted by the plasma being characteristic to the sample material, where the optical system (3) comprises at least one light entrance aperture (31), at least one diffraction grating (32) to split up the light (L) coming from the plasma (A) and one or more detectors (33) to measure the spectrum of the light (L), wherein the plasma stand (2) and the optical system (3) are directly and fixedly mounted on respective a plasma stand flange (2B) and an optical system flange (3B) which are directly and fixedly connected to each other and wherein the optical emission spectrometer (1) further comprises an analyzing unit (34) adapted to analyze the measured spectrum and to compensate for a drift of the spectrum relative to the detector (33) potentially caused by heat transferred from the plasma stand (2) to the optical system (3) considering the thermal expansion of the optical system (3).

公开(公告)号：US12000734B2

公开(公告)日：2024-06-04

申请号：US17774851

申请日：2020-11-06

Applicant: HITACHI HIGH-TECH ANALYTICAL SCIENCE GMBH

Inventor： Heinz Jürgen Graf ,  Rainer Simons

IPC: G01J3/02 ,  G01J3/20

CPC classification number: G01J3/0208 ,  G01J3/021 ,  G01J3/20

Abstract: Spectrometer device (100) with entrance aperture (2), diffraction grating (3), two detectors (5a, 5b) to spectrally measuring the incoming light (L), the detectors being located on the same side of the dispersion plane. Two vertically focusing mirrors (4, 4a, 4b) focus the light onto detectors, the minors being arranged as front row mirrors (4b) and back row minors (4a) along two polygon graphs (6a, 6b) offset to each other and to the focal curve. The angles of deflection (cp, 91) for the front row mirrors are

公开(公告)号：US20210131871A1

公开(公告)日：2021-05-06

申请号：US17090780

申请日：2020-11-05

Applicant: Hitachi High-Tech Analytical Science GmbH

Inventor： Marzena Beata Rak ,  Rainer Simons

IPC: G01J3/28 ,  G01J3/02 ,  G01J3/18

Abstract: The invention relates to an optical system, to a spectrometer device comprising such optical system and to a method to operate such an optical system comprising an entrance aperture for entering primary light containing both a first, lower wavelength range and a second, higher wavelength range into said optical system, a grating for spectral dispersion of the primary light beam into a first fan of diffracted light within the first wavelength range and a primary zero order light beam, a mirror element suitably positioned to reflect the primary zero order light beam back as secondary light beam to the grating where it is dispersed into a second fan of diffracted light within the second wavelength range, a detector arrangement with detectors, an absorber element to be reversibly placed within the primary zero order light beam, and a filter element to be reversibly placed within the primary light beam.

公开(公告)号：US20220397455A1

公开(公告)日：2022-12-15

申请号：US17774851

申请日：2020-11-06

Applicant: HITACHI HIGH-TECH ANALYTICAL SCIENCE GMBH

Inventor： Heinz Jürgen Graf ,  Rainer Simons

IPC: G01J3/02 ,  G01J3/20

Abstract: Spectrometer device (100) with entrance aperture (2), diffraction grating (3), two detectors (5a, 5b) to spectrally measuring the incoming light (L), the detectors being located on the same side of the dispersion plane. Two vertically focusing mirrors (4, 4a, 4b) focus the light onto detectors, the minors being arranged as front row mirrors (4b) and back row minors (4a) along two polygon graphs (6a, 6b) offset to each other and to the focal curve. The angles of deflection (cp, 91) for the front row mirrors are

公开(公告)号：US11162842B2

公开(公告)日：2021-11-02

申请号：US17090780

申请日：2020-11-05

Applicant: Hitachi High-Tech Analytical Science GmbH

Inventor： Marzena Beata Rak ,  Rainer Simons

IPC: G01J3/28 ,  G01J3/18 ,  G01J3/02

Abstract: The invention relates to an optical system, to a spectrometer device comprising such optical system and to a method to operate such an optical system comprising an entrance aperture for entering primary light containing both a first, lower wavelength range and a second, higher wavelength range into said optical system, a grating for spectral dispersion of the primary light beam into a first fan of diffracted light within the first wavelength range and a primary zero order light beam, a mirror element suitably positioned to reflect the primary zero order light beam back as secondary light beam to the grating where it is dispersed into a second fan of diffracted light within the second wavelength range, a detector arrangement with detectors, an absorber element to be reversibly placed within the primary zero order light beam, and a filter element to be reversibly placed within the primary light beam.