公开(公告)号：US10296015B2

公开(公告)日：2019-05-21

申请号：US15025945

申请日：2013-11-15

申请人： Hitachi, Ltd.

发明人： Masaki Odai ,  Yasuyuki Momoi ,  Hironori Ogawa

IPC分类号： G05D3/12 ,  G05B19/00 ,  G01R23/20 ,  G05B15/02

摘要： A sinusoidal signal that is frequency-swept so as to have a frequency region in which each frequency has a different number of cycles and/or application duration is applied to a control system in a movement device that moves a movement target, time-series data for transmission characteristics obtained from said control system as a result of the application of the aforementioned sinusoidal signal is acquired, and said time-series data is subjected to spectral analysis. This allows the provision of a positioning control device and a frequency-characteristics measurement method that make it possible to optimize measuring precision while minimizing increases in the amount of time it takes to measure frequency characteristics.

公开(公告)号：US09673021B2

公开(公告)日：2017-06-06

申请号：US14601327

申请日：2015-01-21

申请人： Hitachi, Ltd.

发明人： Hironori Ogawa ,  Tomohiro Inoue ,  Masaki Odai

IPC分类号： H01J37/20 ,  G01B11/14 ,  H01J37/26 ,  G05B19/404

CPC分类号： H01J37/20 ,  G01B11/14 ,  G05B19/404 ,  G05B2219/37612 ,  G05B2219/42249 ,  G05B2219/49176 ,  H01J37/261 ,  H01J2237/2007 ,  H01J2237/20292 ,  H01J2237/2602

摘要： An object of the invention is to provide a positioning apparatus and a positioning control device that may perform precise positioning by suppressing relative displacement of a movable point and positioning target objects. In a positioning apparatus including a movable stage, a stage position detector that detects a position of the movable stage, a control device that performs positioning of the movable stage, a positioning target object for positioning of the movable stage, and at least one or more sensors in a structure of the positioning target object or the movable stage, the control device includes an amount of relative displacement estimation unit that estimates an amount of relative displacement of the movable stage and the positioning target object using information of the sensor and information of the stage position detector, and a unit that controls the position of the stage using information calculated by the amount of relative displacement estimation unit.

公开(公告)号：US11417496B2

公开(公告)日：2022-08-16

申请号：US17043950

申请日：2019-03-01

申请人： Hitachi, Ltd.

发明人： Motohiro Takahashi ,  Takanori Kato ,  Naruo Watanabe ,  Hironori Ogawa

IPC分类号： H01J37/20

摘要： The problem addressed by the present disclosure is to provide a stage device, a charged particle beam device, and a vacuum device, with which it is possible to increase the speed and the acceleration of positioning and to suppress the leakage of a magnetic field. As a means to resolve this problem, a stage device 100 comprises a support stage 10, a floating mechanism 20, and a movement stage 30. The movement stage 30 has a propulsion-applying unit 36, and the support stage 10 has a propulsion-receiving unit 11. The stage device 100 is configured so that when the movement stage 30 moves and the propulsion-applying unit 36 contacts or approaches the propulsion-receiving unit 11, the propulsion-applying unit 36 applies propulsion in the movement direction to the propulsion-receiving unit 11.