公开(公告)号：US20210361792A1

公开(公告)日：2021-11-25

申请号：US16961708

申请日：2018-12-10

申请人： Heraeus Noblelight GmbH

发明人： Johannes KRAFT ,  Silke SCHLOEMP ,  Jan WINDERLICH

IPC分类号： A61L2/10 ,  H01J61/72 ,  H01J61/52

摘要： UV lamp modules for the ultraviolet irradiation of a substrate. The modules include multiple low-pressure mercury lamps, each having a longitudinal axis, located in a waterproof housing having a bottom, a top and a beam exit opening in the bottom which is closed by a beam exit window. To maintain hygiene, homogeneity and compactness, a first airflow zone for the supply of cooling air and a second, separate airflow zone for the discharge of heated cooling air are formed iii the housing. Viewed in a cross-section through the housing perpendicular to the longitudinal axes of the lamps and in a viewing direction from the bottom to the top, the beam exit window, the lamps and the airflow zones are arranged one after the other. The first airflow zone comprises an air supply duct which is equipped with at least one air-guiding mechanism for supplying cooling air to the lamps.

公开(公告)号：US20230139861A1

公开(公告)日：2023-05-04

申请号：US18089990

申请日：2022-12-28

申请人： Heraeus Noblelight GmbH

发明人： Johannes KRAFT ,  Silke SCHLOEMP ,  Jan WINDERLICH

IPC分类号： A61L2/10 ,  H01J61/52 ,  H01J61/72

摘要： A UV lamp module for the ultraviolet irradiation of a substrate includes a lamp arrangement, a waterproof housing, and first and second airflow zones. The lamp arrangement includes multiple low-pressure mercury lamps each having a longitudinal axis. The waterproof housing surrounds the lamp arrangement and has a bottom side, a top side and at least two side walls connecting the bottom side and the top side to each other, and a beam exit opening on the bottom side which is closed by a beam exit window. The first airflow zone is formed in the housing and has an air supply duct with at least one air-guide for the supply of cooling air to the lamp arrangement. The second airflow zone is separated from the first airflow zone, and is formed in the housing and has an exhaust air duct for the discharge of heated cooling air. When viewed in a cross-section through the housing perpendicular to the longitudinal axes of the low-pressure mercury lamps and in a viewing direction from the bottom side to the top side, the beam exit window, the lamp arrangement and the airflow zones are arranged one after the other.

公开(公告)号：US20150235727A1

公开(公告)日：2015-08-20

申请号：US14621624

申请日：2015-02-13

申请人： Heraeus Noblelight GmbH

发明人： Josef Zoltan LOTT ,  Karl-Wilhelm BRIEDEN ,  Silke SCHLOEMP

IPC分类号： G21K5/10

CPC分类号： G21K5/10 ,  A61L2/10 ,  B41F23/0406 ,  B41F23/0409 ,  B65B55/16 ,  H01L21/263 ,  H01L21/324

摘要： Known operating processes for an irradiation device for irradiating a substrate by a UV emitter include the process steps of: (a) operating the UV emitter at a nominal operating radiation power; (b) continuously feeding the substrate at a feed rate into the irradiation field; and (c) irradiating the substrate in the irradiation field defined by the UV emitter. In order to devise, on this basis, a simple and inexpensive operating process for an irradiation device, which makes a short start-up time feasible after an interruption of the production process, the UV emitter is switched off when there is an interruption of the continuous substrate feed. The emitter temperature of the switched-off UV emitter is measured, and provisions are made for counter-measures to counteract a decrease of the emitter temperature by more than 10° C. below the nominal operating temperature.

摘要翻译： 用于通过UV发射器照射衬底的照射装置的已知操作过程包括以下工艺步骤：（a）以标称工作辐射功率操作UV发射器; （b）以进料速率将基板连续进料到照射场中; 和（c）在由UV发射体限定的照射场中照射衬底。 为了在此基础上设计用于照射装置的简单且廉价的操作过程，其在制造过程中断之后使得启动时间很短，则当发生中断时，UV发射器被切断 连续底物进料。 测量关闭的紫外线发射器的发射极温度，并作出相应措施，以将发射极温度降低超过标称工作温度10°C以下。