公开(公告)号：US06977383B2

公开(公告)日：2005-12-20

申请号：US10750022

申请日：2003-12-31

Applicant: Harry R. Rieger ,  I. C. Edmond Turcu ,  James Morris

Inventor： Harry R. Rieger ,  I. C. Edmond Turcu ,  James Morris

IPC: G21K1/00 ,  H01J3/00 ,  H05G2/00 ,  H05H1/00 ,  H05H6/00

CPC classification number: G03F7/70916 ,  G03F7/70033 ,  G03F7/70825 ,  H05G2/00 ,  H05G2/001 ,  H05G2/005

Abstract: A method and apparatus for generating membrane targets for a laser induced plasma is disclosed herein. Membranes are advantageous targets for laser induced plasma because they are very thin and can be readily illuminated by high-power coherent light, such as a laser, and converted into plasma. Membranes are also advantageous because illumination of the membrane with coherent light produces less debris and splashing than illumination of a thicker, solid target. Spherical membranes possess additional advantages in that they can be readily illuminated from variety of directions and because they can be easily placed (i.e. blown) into a target region for illumination by coherent light. Membranes are also advantageous because they can be formed from a liquid or molten phase of the target material. According to another embodiment, membranes can be formed from a solution in which the target materials are solvated. Membranes can be formed an a variety of ways, such as by rotating a circular apparatus through a reservoir of liquid target material such that membranes form across apertures that are disposed in the circular apparatus. Spherical membranes can also be formed by applying a gas (i.e. blowing) against a membrane formed in an aperture of a circular apparatus.

Abstract translation: 本文公开了一种用于产生激光诱导等离子体的膜靶的方法和装置。 膜是激光诱导等离子体的有利目标，因为它们非常薄并且可以容易地被大功率相干光（例如激光）照射并转换成等离子体。 膜也是有利的，因为具有相干光的膜的照射比较厚的固体靶的照射产生更少的碎屑和飞溅。 球形膜具有额外的优点，因为它们可以容易地从各种方向照射，并且因为它们可以容易地被放置（即吹制）到目标区域中以通过相干光照射。 膜也是有利的，因为它们可以由靶材料的液相或熔融相形成。 根据另一个实施方案，膜可以由目标材料溶剂化的溶液形成。 膜可以以各种方式形成，例如通过旋转圆形装置通过液体目标材料的储存器，使得膜形成在设置在圆形装置中的孔之间。 球形膜也可以通过对形成在圆形装置的孔中的膜施加气体（即吹）而形成。