公开(公告)号：US10114204B2

公开(公告)日：2018-10-30

申请号：US15304632

申请日：2015-04-17

Applicant: HORIBA JOBIN YVON SAS

Inventor： Emmanuel Fretel ,  Damien Andrezejeusky ,  Rene Boidin ,  Philippe De Bettignies

IPC: G02B21/00 ,  G01J3/06 ,  G01J3/44 ,  G01N21/65 ,  G02B26/10

Abstract: An optical beam scanning microscopy apparatus includes a light source adapted to emit an optical beam (2) and a microscope objective (1) adapted for focusing the optical beam (2) in an object plane (11). The microscopy apparatus includes first and second reflecting optical elements (M-X1, M-X2) disposed in series on the optical path of the optical beam (2) between the light source and the microscope objective (1), first elements of angular tilting (21, 25) adapted for tilting the first reflecting optical elements (M-X1, M-XY1) according to a first predetermined rotation angle (RX1), and second elements of angular tilting (22, 26) adapted for tilting the second reflecting optical elements (M-X2, M-XY2) according to a second rotation angle (RX2), in such a way as to angularly tilt the axis (12) of the optical beam (2) by pivoting about the center (O) of the pupil of the microscope objective (1).