公开(公告)号：US09291594B2

公开(公告)日：2016-03-22

申请号：US14573221

申请日：2014-12-17

Applicant: HONEYWELL INTERNATIONAL INC.

Inventor： Mihai Brezeanu ,  Bogdan Catalin Serban ,  Octavian Buiu ,  Viorel Georgel Dumitru

IPC: H01L29/15 ,  G01N27/414 ,  G01N33/00

CPC classification number: G01N27/4141 ,  G01N33/004

Abstract: The present disclosure relates to a carbon dioxide sensor able to function in harsh environment, conditions. The carbon dioxide sensor can include a gate-less field effect transistor including a synthetic, quasi-intrinsic, hydrogen-passivated, single-crystal diamond layer exhibiting a 2-dimension hole gas effect, and a sensing layer comprising both a polymer and a hygroscopic material deposited onto a surface of the gate-less field effect transistor.

Abstract translation: 本公开涉及能够在恶劣环境，条件下起作用的二氧化碳传感器。 二氧化碳传感器可以包括无栅极场效应晶体管，其包括表现出二维空穴效应的合成的准本征的，氢钝化的单晶金刚石层，以及包含聚合物和吸湿性的感测层 沉积在无栅极场效应晶体管的表面上的材料。