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1.发明授权公开(公告)号：US09934940B2
公开(公告)日：2018-04-03
申请号：US15468657
申请日：2017-03-24
IPC分类号： H01J37/00 , H01J37/302 , H01J37/317
CPC分类号： H01J37/3026 , H01J37/20 , H01J37/3045 , H01J37/3056 , H01J37/3171 , H01J2237/20207 , H01J2237/20214 , H01J2237/31745
摘要： There is provided a control device for controlling a charged particle beam apparatus, wherein the beam apparatus comprises a workpiece stage having at least two turning axes which are not parallel to each other and an irradiation unit, and the control device comprises an angle calculation unit that based on a direction of a first processing in which a processed surface having a normal line not parallel to any of the turning axes is generated in the workpiece by the irradiation unit and a direction of a second processing to be processed by the irradiation unit from a direction different from the direction of the first processing with respect to the processed surface to be generated by the first processing, calculates turning angles about the turning axes that changes the direction of the stage from the direction of the first processing to the direction of the second processing.
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2.发明申请公开(公告)号：US20170278673A1
公开(公告)日：2017-09-28
申请号：US15468657
申请日：2017-03-24
IPC分类号： H01J37/302 , H01J37/317
CPC分类号： H01J37/3026 , H01J37/20 , H01J37/3045 , H01J37/3056 , H01J37/3171 , H01J2237/20207 , H01J2237/20214 , H01J2237/31745
摘要： There is provided a control device for controlling a charged particle beam apparatus, wherein the beam apparatus comprises a workpiece stage having at least two turning axes which are not parallel to each other and an irradiation unit, and the control device comprises an angle calculation unit that based on a direction of a first processing in which a processed surface having a normal line not parallel to any of the turning axes is generated in the workpiece by the irradiation unit and a direction of a second processing to be processed by the irradiation unit from a direction different from the direction of the first processing with respect to the processed surface to be generated by the first processing, calculates turning angles about the turning axes that changes the direction of the stage from the direction of the first processing to the direction of the second processing.
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