公开(公告)号：US20160372301A1

公开(公告)日：2016-12-22

申请号：US15181702

申请日：2016-06-14

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Tatsuya ASAHATA ,  Akito MORI ,  Asumi YUZURIHA

IPC: H01J37/20 ,  H01J37/28

CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/20292

Abstract: Disclosed herein is a microsample stage that can be formed through an automatic manufacturing process. The microsample stage includes a base, a microsample-fixing portion that is formed on the base and to which a microsample is fixed, and multiple alignment marks.

Abstract translation: 本文公开了可以通过自动制造过程形成的微样品台。 微样品台包括基部，形成在基部上并且微型样品固定到其上的微取样固定部分和多个对准标记。