公开(公告)号：US20040035201A1

公开(公告)日：2004-02-26

申请号：US10608731

申请日：2003-06-27

Applicant: HEETRONIX

Inventor： Craig A. Vincze ,  James Gibson ,  James D. Parsons ,  Thomas E. Fehlman

IPC: G01F001/68

CPC classification number: G01F1/692 ,  G01F1/6845 ,  G01F1/6847 ,  G01F5/00

Abstract: A mass flow meter employs discrete chip-type temperature sensors to sense a fluid flow rate. The sensor can be a semiconductor chip such as SiC or silicon, or thin film tungsten on an AlN substrate. The sensors can be distributed symmetrically with respect to the conduit through which the fluid flows, and can be connected in a four-sensor bridge circuit for accurate flow rate monitoring. An output from the mass flow meter can be used to control the fluid flow.

Abstract translation: 质量流量计采用分立的片式温度传感器来感测流体流速。 该传感器可以是诸如SiC或硅的半导体芯片，或AlN衬底上的薄膜钨。 传感器可以相对于流体流过的管道对称地分布，并且可以连接在四传感器桥接电路中以进行精确的流量监测。 可以使用质量流量计的输出来控制流体流量。