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公开(公告)号：US12235433B2
公开(公告)日：2025-02-25
申请号：US17634036
申请日：2020-07-16
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomonori Nakamura , Ikuo Arata , Xiangguang Mao
Abstract: A solid immersion lens unit includes a solid immersion lens and a holder for swingably holding the solid immersion lens. The solid immersion lens includes a first lens portion formed of a first material, and a second lens portion formed of a second material having a refractive index smaller than a refractive index of the first material and coupled to the first lens portion. The first lens portion includes a contact surface for contacting with an observation object and a convex first spherical surface. The second lens portion includes a concave second spherical surface facing the first spherical surface and a convex third spherical surface to be disposed to face an objective lens. The holder has a contact portion configured to be contactable with the third spherical surface.
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公开(公告)号：US11913888B2
公开(公告)日：2024-02-27
申请号：US17264588
申请日：2019-04-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Xiangguang Mao , Masanori Kobayashi , Hirotoshi Terada , Ikuo Arata , Masataka Ikesu
CPC classification number: G01N21/8806 , G01N21/9505 , G02B21/02 , G02B21/33 , G02B21/361
Abstract: A solid immersion lens unit includes a solid immersion lens having a contact surface for coming into contact with semiconductor device formed of a silicon substrate and a spherical surface to be disposed to face an objective lens; a holder holding the solid immersion lens; and an optical element held by the holder to be positioned between the objective lens and the solid immersion lens. The solid immersion lens transmits light having at least a part of wavelength in a range of 200 nm or greater and 1100 nm or lower. The optical element corrects aberration caused by a difference in refractive indices between the silicon substrate and the solid immersion lens.
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