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公开(公告)号：US20240094526A1
公开(公告)日：2024-03-21
申请号：US18526305
申请日：2023-12-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Tomoyuki IDE , Yuki MORINAGA
CPC classification number: G02B26/105 , G02B5/08
Abstract: In a mirror unit, a first wall portion is higher than a second wall portion. A window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface. When any one of first to fourth wall portions is set as a first reference wall portion, in a cross-section perpendicular to the first reference wall portion, a first line passing through a first end at a side of the first reference wall portion in the mirror surface and a first corner portion formed at the side of the first reference wall portion by an outer surface and a first side surface in the window member intersects the first wall portion. A wiring portion includes a portion extending inside a base and leads outside a frame member.
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公开(公告)号：US20240027745A1
公开(公告)日：2024-01-25
申请号：US18224093
申请日：2023-07-20
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomoyuki IDE , Yuki MORINAGA , Mikito TAKAHASHI
IPC: G02B26/08
CPC classification number: G02B26/0816
Abstract: An optical module includes: a mirror unit including a mirror device including a movable mirror portion provided with a coil; and a magnet unit including a first magnet, a second magnet, and a third magnet arranged along a first direction, and generating a magnetic field acting on the movable mirror portion. The mirror unit is disposed on the magnet unit in a second direction perpendicular to the first direction, and has a bottom surface facing the magnet unit. A protrusion portion protruding to a magnet unit side is formed on the bottom surface. A width of the protrusion portion in the first direction is equal to or less than a width of the first magnet in the first direction. The mirror unit is fixed to an upper surface of the first magnet at the protrusion portion.
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公开(公告)号：US20240059555A1
公开(公告)日：2024-02-22
申请号：US17766780
申请日：2020-08-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Takahiro MATSUMOTO , Tomoyuki IDE , Mikito TAKAHASHI
CPC classification number: B81C1/00825 , G02B26/0833 , B81C2201/0146 , B81C2201/0132
Abstract: A method for manufacturing a mirror device, the method includes a first step of preparing a wafer having a support layer and a device layer; a second step of forming a slit in the wafer such that the movable portion becomes movable with respect to the base portion by removing a part of each of the support layer and the device layer from the wafer by etching and forming a plurality of parts each corresponding to the structure in the wafer, after the first step; a third step of performing wet cleaning for cleaning the wafer using a cleaning liquid after the second step; and a fourth step of cutting out each of the plurality of parts from the wafer after the third step. In the second step, a circulation hole penetrating the wafer is formed at a part other than the slit in the wafer by the etching.
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公开(公告)号：US20230168493A1
公开(公告)日：2023-06-01
申请号：US18103030
申请日：2023-01-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Tomoyuki IDE , Yuki MORINAGA
CPC classification number: G02B27/0031 , G02B26/101 , G02B27/0006 , G02B26/085 , G02B26/0833 , G02B26/10
Abstract: A mirror unit includes an optical scanning device, a frame member, and a window member. The frame member includes first and second wall portions facing each other in an X-axis direction. The first wall portion is higher than the second wall portion. The window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface of the optical scanning device. In a cross-section parallel to the X-axis direction, the first wall portion is separated from a first line passing through a first end at a side of the first wall portion in the mirror surface and a first corner portion formed at the side of the first wall portion by an outer surface opposite to the frame member and a first side surface in the window member.
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公开(公告)号：US20220363535A1
公开(公告)日：2022-11-17
申请号：US17765633
申请日：2020-08-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Tomoyuki IDE , Mikito TAKAHASHI
Abstract: A mirror device manufacturing method includes a forming step of forming a structure by forming a base portion, a movable portion, and a coupling portion coupling the base portion and the movable portion to each other such that the movable portion is able to swing with respect to the base portion through processing of a wafer, and forming a mirror layer in the movable portion; and a collecting step of performing collection of foreign substances from the structure using a collection member after the forming step. A mirror unit manufacturing method includes a sealing step of sealing the mirror device after the collecting step.
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Patent Agency Ranking
公开(公告)号：US20220283430A1
公开(公告)日：2022-09-08
申请号：US17748563
申请日：2022-05-19
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Tomoyuki IDE , Yuki MORINAGA
Abstract: In a mirror unit, a first wall portion is higher than a second wall portion. A window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface. When any one of first to fourth wall portions is set as a first reference wall portion, in a cross-section perpendicular to the first reference wall portion, a first line passing through a first end at a side of the first reference wall portion in the mirror surface and a first corner portion formed at the side of the first reference wall portion by an outer surface and a first side surface in the window member intersects the first wall portion. A wiring portion includes a portion extending inside a base and leads outside a frame member.
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公开(公告)号：US20240264429A1
公开(公告)日：2024-08-08
申请号：US18432346
申请日：2024-02-05
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomoyuki IDE , Daiki SUZUKI
IPC: G02B26/08
CPC classification number: G02B26/0825
Abstract: In a mirror device, a first rib portion includes a pair of first portions extending toward one side in a first direction and a first extending portion extending between the first portions. A second rib portion includes a pair of second portions extending toward the other side in the first direction and a second extending portion extending between the second portions. A third rib portion includes a pair of third portions extending toward one side in a second direction. A fourth rib portion includes a pair of fourth portions extending toward the other side in the second direction. A rib portion does not include portions formed between the third portions and between the fourth portions and extending to intersect the second axis when viewed in a third direction. The first to fourth portions are portions different from one another.
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公开(公告)号：US20230418048A1
公开(公告)日：2023-12-28
申请号：US18211837
申请日：2023-06-20
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomoyuki IDE
CPC classification number: G02B26/085 , H01F7/02
Abstract: An optical module includes a mirror unit, a magnet unit, and a package including a recess. The magnet unit includes a first magnet and a second magnet. The recess includes a base wall portion to which an upper surface of the magnet unit is fixed, and a side wall portion facing a side surface of the magnet unit. The mirror unit is disposed on a second surface on an opposite side of the base wall portion from a first surface to which the magnet unit is fixed. A second upper surface of the second magnet is located closer to the lower side than a first upper surface of the first magnet. The magnet unit is fixed to the base wall portion by an adhesive material disposed at least between the first surface of the base wall portion and the second upper surface of the second magnet.
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公开(公告)号：US20220276487A1
公开(公告)日：2022-09-01
申请号：US17749697
申请日：2022-05-20
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Tomoyuki IDE , Yuki MORINAGA
Abstract: A mirror unit includes an optical scanning device, a frame member, and a window member. The frame member includes first and second wall portions facing each other in an X-axis direction. The first wall portion is higher than the second wall portion. The window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface of the optical scanning device. In a cross-section parallel to the X-axis direction, the first wall portion is separated from a first line passing through a first end at a side of the first wall portion in the mirror surface and a first corner portion formed at the side of the first wall portion by an outer surface opposite to the frame member and a first side surface in the window member.
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公开(公告)号：US20200278533A1
公开(公告)日：2020-09-03
申请号：US16775456
申请日：2020-01-29
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Tomoyuki IDE , Yuki MORINAGA
Abstract: A mirror unit includes an optical scanning device, a frame member, and a window member. The frame member includes first and second wall portions facing each other in an X-axis direction. The first wall portion is higher than the second wall portion. The window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface of the optical scanning device. In a cross-section parallel to the X-axis direction, the first wall portion is separated from a first line passing through a first end at a side of the first wall portion in the mirror surface and a first corner portion formed at the side of the first wall portion by an outer surface opposite to the frame member and a first side surface in the window member.
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