公开(公告)号：US11460497B2

公开(公告)日：2022-10-04

申请号：US16624008

申请日：2018-04-18

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Toru Matsumoto ,  Koichi Endo ,  Tomonori Nakamura ,  Kazushige Koshikawa

IPC: G01R31/26

Abstract: A device analysis apparatus is a device analysis apparatus for determining a quality of a power semiconductor device, including an application unit that applies a voltage signal to the power semiconductor device, a light detection unit that detects light from the power semiconductor device at a plurality of detection positions and outputs detection signals based on detection results, and a determination unit that determines the quality of the power semiconductor device based on temporal changes of the detection signals.