公开(公告)号：US20040239931A1

公开(公告)日：2004-12-02

申请号：US10854628

申请日：2004-05-27

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J003/28

CPC classification number: G01J3/2803 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0291

Abstract: A spectrometer is configured by using a photodetector 1B which comprises a semiconductor substrate 10 having an upper surface 10a, a photodiode array 11 having a plurality of photodiodes 12 aligned on the upper surface 10a of the substrate 10, and a light input section 13 including an opening formed in a predetermined positional relationship to the photodiode array 11; and a main body 2 having a plate portion 20 and support portions 21 and 22 mounted on the substrate 10 of the photodetector 1B. The spectrometer is provided with a lens 23 protruded from a lower face 20b of the plate portion 20 and a planar aberration-reduced blazed reflection diffraction grating 24 provided on an upper face 20a of the plate portion 20 for separating incident light having entered through the light input section 13 and passed through the lens 23 into its spectral components, and configured to detect the spectral components with the photodiode array 11. Thus, a photodetector capable of improving the positioning accuracy of components when it is applied to a spectrometer and the spectrometer using the same are realized.

Abstract translation: 通过使用光电检测器1B构成光谱仪，该光电检测器1B包括具有上表面10a的半导体衬底10，具有在衬底10的上表面10a上排列的多个光电二极管12的光电二极管阵列11和光输入部13， 开口以与光电二极管阵列11的预定位置关系形成; 以及主体2，其具有安装在光电检测器1B的基板10上的板部20和支撑部21和22。 光谱仪设置有从板部20的下表面20b突出的透镜23和设置在板部20的上表面20a上的平面像差减少的闪光反射衍射光栅24，用于分离通过光入射的入射光 输入部分13并通过透镜23进入其光谱分量，并且被配置为用光电二极管阵列11检测光谱分量。因此，一种光电检测器能够在将其应用于光谱仪时提高部件的定位精度，而光谱仪使用 同样实现。