Nitride semiconductor device and method of manufacturing the same
    1.
    发明授权
    Nitride semiconductor device and method of manufacturing the same 有权
    氮化物半导体器件及其制造方法

    公开(公告)号:US07102173B2

    公开(公告)日:2006-09-05

    申请号:US11074413

    申请日:2005-03-08

    Abstract: Provided are a nitride semiconductor device and method of manufacturing the same. In the method, semiconductor nanorods are vertically grown on a substrate, and then a nitride semiconductor thin film is deposited on the substrate having the semiconductor nanorods. Accordingly, a high-quality nitride semiconductor thin film can be deposited on a variety of inexpensive, large-sized substrates. Also, because the nitride semiconductor thin film containing the semiconductor nanorods can easily emit light through openings between the nanorods, internal scattering can be greatly reduced. Thus, the nitride semiconductor thin film can be usefully employed in optical devices such as light emitting diodes and electronic devices.

    Abstract translation: 提供一种氮化物半导体器件及其制造方法。 在该方法中,半导体纳米棒在衬底上垂直生长,然后在具有半导体纳米棒的衬底上沉积氮化物半导体薄膜。 因此,可以在各种廉价的大尺寸基板上沉积高质量的氮化物半导体薄膜。 此外,由于含有半导体纳米棒的氮化物半导体薄膜可以容易地通过纳米棒之间的开口发光,因此可以大大降低内部散射。 因此,氮化物半导体薄膜可以有效地用于诸如发光二极管和电子器件的光学器件中。

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