公开(公告)号：US20220091515A1

公开(公告)日：2022-03-24

申请号：US17457514

申请日：2021-12-03

Applicant: Gigaphoton Inc.

Inventor： Makoto TANAKA ,  Yosuke Fujimaki ,  Takashi Ito ,  Yousuke Kawagoe

IPC: G03F7/20 ,  H01S3/036 ,  F04D23/00 ,  F04D29/66

Abstract: A laser chamber of a discharge-excitation-type gas laser apparatus may include a container which contains laser gas therein; a pair of discharge electrodes arranged in the container; a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades.

公开(公告)号：US11947263B2

公开(公告)日：2024-04-02

申请号：US17457514

申请日：2021-12-03

Applicant: Gigaphoton Inc.

Inventor： Makoto Tanaka ,  Yosuke Fujimaki ,  Takashi Ito ,  Yousuke Kawagoe

IPC: G03F7/20 ,  F04D23/00 ,  F04D29/66 ,  G03F7/00 ,  H01S3/036 ,  H01S3/225

CPC classification number: G03F7/70025 ,  F04D23/00 ,  F04D29/667 ,  H01S3/036 ,  H01S3/225

Abstract: A laser chamber of a discharge-excitation-type gas laser apparatus may include a container which contains laser gas therein; a pair of discharge electrodes arranged in the container; a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades.