公开(公告)号：US20210026254A1

公开(公告)日：2021-01-28

申请号：US16894657

申请日：2020-06-05

Applicant: Gigaphoton Inc.

Inventor： Takanari KOBAYASHI ,  Hirokazu HOSODA

IPC: G03F7/20 ,  H05G2/00

Abstract: An extreme ultraviolet light generation system includes: a chamber; a target generation unit; a laser system configured to output a first pre-pulse laser beam, a second pre-pulse laser beam, and a main pulse laser beam so that fluence of the first pre-pulse laser beam is 1.5 J/cm2 to 16 J/cm2 inclusive at a position where a target is irradiated with the first pre-pulse laser beam; and a control unit configured to control the laser system so that a first delay time from a timing of irradiation of the target with the first pre-pulse laser beam to a timing of irradiation with the second pre-pulse laser beam and a second delay time from the timing of irradiation of the target with the second pre-pulse laser beam to a timing of irradiation with the main pulse laser beam have a following relation: the first delay time

公开(公告)号：US20220035249A1

公开(公告)日：2022-02-03

申请号：US17337560

申请日：2021-06-03

Applicant: Gigaphoton Inc.

Inventor： Takanari KOBAYASHI ,  Hirokazu HOSODA ,  Yoshiyuki HONDA

IPC: G03F7/20 ,  H05G2/00 ,  H01L21/027

Abstract: An extreme ultraviolet light generation system may include a laser system emitting first prepulse laser light, second prepulse laser light, and main pulse laser light in this order; a chamber including at least one window for introducing, into the chamber, the first prepulse laser light, the second prepulse laser light, and the main pulse laser light; a target supply unit supplying a target to a predetermined region in the chamber; and a processor controlling the laser system to irradiate the target with the first prepulse laser light, irradiate the target, having been irradiated with the first prepulse laser light, with the second prepulse laser light having a pulse time width longer than a pulse time width of the main pulse laser light, and irradiate the target, having been irradiated with the second prepulse laser light, with the main pulse laser light temporally separated from the second prepulse laser light.