公开(公告)号：US10916910B2

公开(公告)日：2021-02-09

申请号：US16571390

申请日：2019-09-16

Applicant: Gigaphoton Inc.

Inventor： Shinichi Matsumoto ,  Miwa Igarashi

IPC: H01S3/13 ,  H01S3/137 ,  H01S3/08 ,  H01S3/081 ,  H01S3/225 ,  H01S3/1055

Abstract: A line narrowing module includes a prism that refracts laser light in a first plane, a grating that disperses the laser light in the first plane, first to fourth elements, and a rotation mechanism and narrows the linewidth of the laser light. The second element is supported between the first and fourth elements by the first element. The rotation mechanism rotates the second element relative to the first element around an axis intersecting the first plane. The prism is located between the second and fourth elements and so supported by the second element that the rotation mechanism rotates the prism and the second element. The third element has elasticity and is compressed and located between the prism and the fourth element. The fourth element receives reaction force from the compressed third element. The second element is mechanically independent of the fourth element in the rotational direction of the rotation mechanism.

公开(公告)号：US11411364B2

公开(公告)日：2022-08-09

申请号：US17372106

申请日：2021-07-09

Applicant: Gigaphoton Inc.

Inventor： Miwa Igarashi ,  Shinichi Matsumoto

IPC: H01S3/137 ,  G03F7/20 ,  H01S3/08 ,  G02B26/08 ,  H01S3/034 ,  H01S3/225

Abstract: A line narrowing module includes a prism including an entrance side surface that light enters, an exit side surface from which the light is emitted, and a bottom surface, and configured to wavelength-disperse the light having entered the entrance side surface and to emit the light from the exit side surface; a holder portion having a stationary surface on which the bottom surface of the prism is secured; a rotary mechanism portion including a rotary stage on which the holder portion is secured, the rotary stage being configured to rotate the prism around an axis perpendicular to a dispersion plane of the light emitted from the prism; a drive unit configured to rotate the rotary stage; and a grating configured to reflect the light emitted from the prism, centroids of the prism, the holder portion, and the rotary stage being located on the axis.