公开(公告)号：US20250038469A1

公开(公告)日：2025-01-30

申请号：US18912020

申请日：2024-10-10

Applicant: Gigaphoton Inc.

Inventor： Tsukasa HORI ,  Masahide KATO

IPC: H01S3/038 ,  H01S3/03

Abstract: Discharge electrodes to be used in a gas laser device for exciting a laser gas containing fluorine by discharge include a cathode and an anode. The anode is arranged as facing the cathode and includes an electrode base member including a metal, and a coating layer including an insulating material and coating a part of a side surface, parallel to a longitudinal direction, of the electrode base member. The coating layer includes a first portion coating a first region of the side surface and a second portion coating a second region of the side surface, located farther from the cathode than the first region in a discharge direction perpendicular to the longitudinal direction, and being thicker than the first portion.

公开(公告)号：US20200280161A1

公开(公告)日：2020-09-03

申请号：US16865537

申请日：2020-05-04

Applicant: Gigaphoton Inc.

Inventor： Yoshinobu WATABE ,  Masahide KATO ,  Hiroshi FURUSATO

IPC: H01S3/106 ,  H01S3/038 ,  G02B7/02 ,  G02B27/09 ,  G03F7/20

Abstract: An optical element moving apparatus includes a first holder configured to hold a first optical element, a second holder configured to hold a second optical element and having an inclination that inclines with respect to a first direction in which the second holder approaches the first holder, a guide section configured to be capable of moving the second holder in a direction parallel to the first direction, and an elastic member disposed in a position which is located between the first holder and the second holder and through which a first plane passes, the first plane intersecting the inclination at right angles and being parallel to the first direction.