公开(公告)号：US20070164215A1

公开(公告)日：2007-07-19

申请号：US11642249

申请日：2006-12-20

Applicant: Gero Walter ,  Rainer Harle

Inventor： Gero Walter ,  Rainer Harle

IPC: G01N23/00

CPC classification number: H01J37/26 ,  H01J37/21 ,  H01J2237/047 ,  H01J2237/05 ,  H01J2237/216 ,  H01J2237/24507 ,  H01J2237/2485 ,  H01J2237/28 ,  H01J2237/2802

Abstract: A method and a device for determining the distance from the sample to be examined to at least one reference point which function independently of the type of sample. A signal is modulated to a first potential of a sample and a primary particle beam is directed at the sample, resulting in a secondary particle beam being formed by an interaction, the particles of this beam having the modulated signal. The particles of the secondary particle beam and the signal modulated to the potential of the particles of the secondary particle beam are detected. By comparing the detected modulated signal to a reference signal, the distance is determined from the relationship between the reference signal and the detected modulated signal. The device has the corresponding components for implementing the method.

Abstract translation: 一种用于确定从被检测样品到至少一个独立于样品类型起作用的参考点的距离的方法和装置。 信号被调制到样品的第一电位，并且一次粒子束被引导到样品，导致通过相互作用形成二次粒子束，该束的粒子具有调制信号。 检测二次粒子束的粒子和调制到二次粒子束的粒子的电位的信号。 通过将检测到的调制信号与参考信号进行比较，根据参考信号与检测到的调制信号之间的关系确定距离。 该设备具有用于实现该方法的相应组件。

公开(公告)号：US07521677B2

公开(公告)日：2009-04-21

申请号：US11642249

申请日：2006-12-20

Applicant: Gero Walter ,  Rainer Härle

Inventor： Gero Walter ,  Rainer Härle

IPC: H01J37/26

CPC classification number: H01J37/26 ,  H01J37/21 ,  H01J2237/047 ,  H01J2237/05 ,  H01J2237/216 ,  H01J2237/24507 ,  H01J2237/2485 ,  H01J2237/28 ,  H01J2237/2802

Abstract: A method and a device for determining the distance from the sample to be examined to at least one reference point which function independently of the type of sample. A signal is modulated to a first potential of a sample and a primary particle beam is directed at the sample, resulting in a secondary particle beam being formed by an interaction, the particles of this beam having the modulated signal. The particles of the secondary particle beam and the signal modulated to the potential of the particles of the secondary particle beam are detected. By comparing the detected modulated signal to a reference signal, the distance is determined from the relationship between the reference signal and the detected modulated signal. The device has the corresponding components for implementing the method.

Abstract translation: 一种用于确定从被检测样品到至少一个独立于样品类型起作用的参考点的距离的方法和装置。 信号被调制到样品的第一电位，并且一次粒子束被引导到样品，导致通过相互作用形成的二次粒子束，该束的粒子具有调制信号。 检测二次粒子束的粒子和调制到二次粒子束的粒子的电位的信号。 通过将检测到的调制信号与参考信号进行比较，根据参考信号与检测到的调制信号之间的关系确定距离。 该设备具有用于实现该方法的相应组件。