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公开(公告)号:US20210090856A1
公开(公告)日:2021-03-25
申请号:US16635725
申请日:2018-08-01
Applicant: Gatan, Inc.
Inventor: Edward Michael JAMES , Ray Dudley TWESTEN
IPC: H01J37/26 , H01J37/22 , H01J37/05 , H01J37/244
Abstract: A system and method are disclosed for acquiring Electron Energy Loss Spectrometry (EELS) spectra in a transmission electron microscope. The inventive system and method maximize spectrum acquisition rate and duty cycle by exposing a first portion of an image sensor to a first spectrum while a previously exposed potion of the sensor is read out of the sensor during some or all of the exposure time.