公开(公告)号：US20180245955A1

公开(公告)日：2018-08-30

申请号：US15557018

申请日：2017-02-01

Applicant: FUJIKURA LTD.

Inventor： Hayato Arai ,  Tatsuya Shioiri ,  Naoki Takayama

IPC: G01F1/38 ,  B81B3/00 ,  B81C1/00

CPC classification number: G01F1/383 ,  B81B3/00 ,  B81B3/0072 ,  B81B2201/0264 ,  B81B2203/0118 ,  B81C1/00 ,  B81C1/00666 ,  B81C2201/0173 ,  G01F1/34 ,  G01L13/06

Abstract: A differential pressure detection element includes: a support portion having an opening; a cantilever portion supported in a cantilever manner by the support portion so as to protrude into the opening; a diffusion layer including a piezoresistive portion provided at a fixed end of the cantilever portion; a pair of wiring portions electrically connected to the diffusion layer; a first insulating layer covering the diffusion layer; and a second insulating layer laid on the first insulating layer. A linear expansion coefficient of the first insulating layer is smaller than a linear expansion coefficient of a material of which the cantilever portion is composed, and a linear expansion coefficient of the second insulating layer is larger than the linear expansion coefficient of the first insulating layer.

公开(公告)号：US10175073B2

公开(公告)日：2019-01-08

申请号：US15557018

申请日：2017-02-01

Applicant: FUJIKURA LTD.

Inventor： Hayato Arai ,  Tatsuya Shioiri ,  Naoki Takayama

IPC: G01F1/38 ,  B81B3/00 ,  B81C1/00 ,  G01L13/06 ,  G01F1/34

Abstract: A differential pressure detection element includes: a support portion having an opening; a cantilever portion supported in a cantilever manner by the support portion so as to protrude into the opening; a diffusion layer including a piezoresistive portion provided at a fixed end of the cantilever portion; a pair of wiring portions electrically connected to the diffusion layer; a first insulating layer covering the diffusion layer; and a second insulating layer laid on the first insulating layer. A linear expansion coefficient of the first insulating layer is smaller than a linear expansion coefficient of a material of which the cantilever portion is composed, and a linear expansion coefficient of the second insulating layer is larger than the linear expansion coefficient of the first insulating layer.