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公开(公告)号：US20230359228A1
公开(公告)日：2023-11-09
申请号：US18346434
申请日：2023-07-03
申请人： FUJIKIN INCORPORATED
发明人： Katsuyuki SUGITA , Kouji NISHINO , Naofumi YASUMOTO , Kaoru HIRATA , Shinya OGAWA , Keisuke IDEGUCHI
CPC分类号： G05D7/0623 , F16K31/004 , G05B15/02 , G05D7/0635 , G01F1/363
摘要： A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.
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公开(公告)号：US20220283081A1
公开(公告)日：2022-09-08
申请号：US17637617
申请日：2020-08-31
申请人： FUJIKIN INCORPORATED
摘要： The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, a first light-transmission member 11 for transmitting light from the light source to the measurement cell, a second light transmission member 12 for transmitting light from the measurement cell to the photodetector, a lens 3A provided in the fluid unit, the lens 3A being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensor 5 for measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuit 28 for detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure sensor and the concentration of fluid in order to reduce the measurement error due to the refractive index of the fluid.
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公开(公告)号：US20220197316A1
公开(公告)日：2022-06-23
申请号：US17605948
申请日：2020-04-16
申请人： FUJIKIN INCORPORATED
发明人： Kaoru HIRATA , Keisuke IDEGUCHI , Shinya OGAWA , Katsuyuki SUGITA , Masaaki NAGASE , Kouji NISHINO , Nobukazu IKEDA , Hiroyuki ITO
摘要： The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.
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公开(公告)号：US20210356346A1
公开(公告)日：2021-11-18
申请号：US17282016
申请日：2019-10-02
申请人： FUJIKIN INCORPORATED
摘要： A pressure sensor includes a cylindrical member configured to be attached to a body having a fluid passage, and a pressure sensor unit connected to the cylindrical member for detecting a pressure of a fluid flowing through the fluid passage, wherein the cylindrical member is made of a nickel-molybdenum-chromium alloy material or a stainless steel material, wherein the pressure sensor unit includes a sensor body closed at one end with a diaphragm and a pressure detecting element for outputting displacement of the diaphragm as pressure, and wherein the sensor body is made of a cobalt-nickel alloy material, and is connected at an opening side end portion to one end portion of the cylindrical member.
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公开(公告)号：US20210240208A1
公开(公告)日：2021-08-05
申请号：US16972157
申请日：2019-06-19
申请人： FUJIKIN INCORPORATED
发明人： Kaoru HIRATA , Shinya OGAWA , Katsuyuki SUGITA , Kouji NISHINO , Nobukazu IKEDA
摘要： A flow rate control method performed in a flow control device 100 having a first control valve 6 provided in the flow path, a second control valve 8 provided downstream of the first control valve, and a pressure sensor 3 for measuring a fluid pressure upstream of the first control valve and downstream of the second control valve, comprises, at the time of flow rate raise, a step (a) of determining a pressure remaining downstream of the first control valve by using a pressure sensor in a state of closing the second control valve, and a step (b) of controlling the pressure remaining downstream of the first control valve by adjusting the opening degree of the second control valve on the basis of the output from the pressure sensor, and flowing a fluid at the first flow rate downstream the second control valve.
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6.发明申请公开(公告)号：US20200088561A1
公开(公告)日：2020-03-19
申请号：US16471768
申请日：2017-12-22
申请人： FUJIKIN INCORPORATED
发明人： Atsushi HIDAKA , Takatoshi NAKATANI , Satoru YAMASHITA , Katsuyuki SUGITA , Kaoru HIRATA , Masaaki NAGASE , Kouji NISHINO , Nobukazu IKEDA
IPC分类号： G01F23/22 , B01J4/02 , C23C16/448 , H01L21/67 , G05D9/12
摘要： The liquid level meter according to the present invention includes a resistive temperature detector, a temperature measuring body located above it, a temperature detecting unit detecting temperatures of the resistive temperature detector and the temperature measuring body, a current controlling unit determining a current value to be flowed through the resistive temperature detector so that the resistive temperature detector and the temperature measuring body become a predetermined temperature difference, a power supply unit supplying the current of the determined current value to the resistive temperature detector, and a liquid level detecting unit detecting a position of a liquid level. The liquid level detecting unit detects the change in the relative position of the liquid level relative to the resistive temperature detector by determining whether a change width of the current value flowing through the resistive temperature detector during a predetermined period of time is positive or negative, and whether the change width is not less than a predetermined value. As a result, the position of the liquid level can be accurately detected without being affected by the variation in the characteristics of the resistive temperature detector.
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公开(公告)号：US20190250648A1
公开(公告)日：2019-08-15
申请号：US16317692
申请日：2017-07-25
申请人： FUJIKIN INCORPORATED
发明人： Kaoru HIRATA , Katsuyuki SUGITA , Nobukazu IKEDA , Kouji NISHINO
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , G05D7/06
摘要： A pressure-type flow rate control device includes a control valve; a pressure sensor provided downstream of the control valve; an orifice-built-in valve provided downstream of the pressure sensor; and a control unit connected to the control valve and pressure sensor. The built-in orifice valve has a valve mechanism comprising a valve seat body and a valve element for opening/closing a flow path; a drive mechanism for driving the valve mechanism, and an orifice member provided in the vicinity of the valve mechanism. The pressure-type flow rate control device further includes an opening/closing-detection mechanism for detecting the open/closed state of the valve mechanism, the control unit being configured to receive a detection signal from the opening/closing-detection mechanism.
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8.发明申请公开(公告)号：US20190129452A1
公开(公告)日：2019-05-02
申请号：US16094252
申请日：2017-04-21
申请人： FUJIKIN INCORPORATED
IPC分类号： G05D7/06 , G05B19/042
摘要： The fluid controller includes a fluid control module and an external control module. The fluid control module includes a control valve on a flow channel, a valve driver circuit that drives the control valve, a fluid meter on a flow channel, and a first processor that processes a signal output from the fluid meter. The external control module includes a second processor that processes a signal output from the first processor. The second processor outputs a valve control signal according to the signal of the fluid meter output from the first processor, the valve control signal is directly input to the valve driver circuit without through the first processor, and the valve driver circuit outputs a voltage that drives the control valve according to the valve control signal from the second processor.
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9.发明申请公开(公告)号：US20190017855A1
公开(公告)日：2019-01-17
申请号：US16069126
申请日：2017-01-12
申请人： FUJIKIN INCORPORATED
发明人： Yohei SAWADA , Nobukazu IKEDA , Kouji NISHINO , Masaaki NAGASE
摘要： A gas supply system includes a flow controller, a first shutoff valve provided downstream of the flow controller, a second shutoff valve provided in a first flow passage communicating with the downstream side of the first shutoff valve, a second flow passage branching from the first flow passage, a third shutoff valve provided in the second flow passage, a pressure sensor that detects a pressure in a flow passage surrounded by the first, second, and third shutoff valves, a temperature sensor that detects a temperature in the flow passage, a volume measuring tank having a known volume connected downstream of the third shutoff valve, and a controller that obtains a volume of the flow passage by applying Boyle's law to open and closed states of the third shutoff valve and calculates the flow rate using the passage volume and outputs of the pressure and temperature sensors.
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10.发明申请公开(公告)号：US20180240961A1
公开(公告)日：2018-08-23
申请号：US15751422
申请日：2016-08-09
申请人： FUJIKIN INCORPORATED
摘要： A piezoelectric linear actuator comprising a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, wherein the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.
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