公开(公告)号：US20220268365A1

公开(公告)日：2022-08-25

申请号：US17638772

申请日：2020-06-12

申请人： FUJIKIN INCORPORATED

发明人： Kaoru HIRATA ,  Masaaki NAGASE ,  Atsushi HIDAKA ,  Kazuyuki MORISAKI ,  Keisuke IDEGUCHI ,  Kosuke SUGIMOTO ,  Masafumi KITANO ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC分类号： F16K7/17 ,  C09D127/12

摘要： A diaphragm valve includes a body 3 having a flow path 2 formed therein, a sheet 4 formed in the flow path 2, a metal diaphragm 5 for opening and closing the flow path 2 by abutting on or separating from the sheet 4, a pair of clamping parts 6 and 7 for claiming peripheral edge portions of both side surfaces of the metal diaphragm 5 respectively to fix the metal diaphragm 5 to the body 3, and an actuator 8 for abutting the metal diaphragm 5 on the sheet 4 or separating the metal diaphragm from the sheet 4, wherein a fluorine resin coating is formed on a sheet side surface 5a of the metal diaphragm 5 in a region excluding a clamping region D-C between the sheet side surface 5a and the clamping part 7, and at least in a contact region B-A with the sheet 4 in a region C surrounded by the clamping region D-C.

公开(公告)号：US20240167577A1

公开(公告)日：2024-05-23

申请号：US18552826

申请日：2022-03-08

申请人： FUJIKIN INCORPORATED

发明人： Atsushi HIDAKA ,  Kazuteru TANAKA ,  Takatoshi NAKATANI ,  Kazuyuki MORISAKI ,  Masafumi KITANO ,  Kaoru HIRATA ,  Masaaki NAGASE ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC分类号： F16K25/00 ,  F16K7/17 ,  G05D7/06

CPC分类号： F16K25/005 ,  F16K7/17 ,  G05D7/0635

摘要： A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.

公开(公告)号：US20230324008A1

公开(公告)日：2023-10-12

申请号：US18044184

申请日：2021-10-05

申请人： FUJIKIN INCORPORATED

发明人： Takatoshi NAKATANI ,  Atsushi HIDAKA ,  Kazuyuki MORISAKI ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC分类号： F17C9/02 ,  F17C13/02

CPC分类号： F17C9/02 ,  F17C13/025 ,  F17C2250/043 ,  F17C2227/0302

摘要： A gas supply system 100 comprises: a first vaporization supply device 10A including a first vaporization section 12A having a heater, a first valve 14A, and a first supply pressure sensor 16A for measuring a gas pressure between the first vaporization section and the first valve; a second vaporization supply device 10B including a second vaporization section 12B having a heater, a second valve 14B, and a second supply pressure sensor 16B for measuring a gas pressure between the second vaporization section and the second valve; and a control circuit 20. The system is configured to flow a gas from the first vaporization section 10A and a gas from the second vaporization section 10B sequentially into a common flow path, by shifting timings of an opening period of the first valve 14A and an opening period of the second valve 14B.

公开(公告)号：US20230002900A1

公开(公告)日：2023-01-05

申请号：US17757283

申请日：2020-11-09

申请人： FUJIKIN INCORPORATED

发明人： Atsushi HIDAKA ,  Kazuyuki MORISAKI ,  Kouji NISHINO ,  Nobukazu lKEDA

IPC分类号： C23C16/455 ,  C23C16/18 ,  C23C16/02

摘要： A vaporization supply device includes a vaporizer for heating and vaporizing a liquid raw material L, a flow rate controller for controlling a flow rate of the gas supplied from the vaporizer to a gas supply destination, and a controller for heating the inside of the vaporizer to obtain a necessary gas flow rate, and performing a feedback control so that a pressure becomes equal to or higher than a predetermined value. The controller is configured so as to stop the feedback control at the time point when the flow rate control by the flow rate controller starts, then heat the liquid raw material by an amount of heat provided to the vaporizer more than the heat that has already been provided immediately before the feedback control ends, and change to the feedback control after a predetermined time has elapsed from the time point when the flow rate control by the flow rate controller starts.

公开(公告)号：US20230400114A1

公开(公告)日：2023-12-14

申请号：US18246823

申请日：2021-10-18

申请人： FUJIKIN INCORPORATED

发明人： Atsushi HIDAKA ,  Takatoshi NAKATANI ,  Kazuyuki MORISAKI ,  Tomokazu HIROTA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC分类号： F16K27/12

CPC分类号： F16K27/12

摘要： [Problem] The main purpose of the present invention is to provide a casing for a fluid controller capable of enabling maintenance inside the casing even in a state where the lower part of the casing is fixed to a main body of a fluid controller, and improving maintainability.
[Solution] A casing 1 for covering devices 104,106,108 on a main body 101 of a fluid controller 100, the casing 1 is configured so as to be dividable into a plurality of parts, and the plurality of parts comprising a first part 2 provided with a fixing portion 2i for fixing to the main body 101, a second part 4 attached to the first part 2, and a third part 5 attachably and detachably provided at an upper partition higher than a predetermined height position of the casing 1.

公开(公告)号：US20190085988A1

公开(公告)日：2019-03-21

申请号：US16080633

申请日：2017-02-23

申请人： FUJIKIN INCORPORATED

发明人： Toru HIRAI ,  Kazuyuki MORISAKI ,  Kaoru HIRATA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC分类号： F16K7/14 ,  G05D7/06

摘要： The flow controller according to the present invention includes: a control valve; a first flow passage provided on the downstream side of the control valve; a second flow passage; and an expansion chamber provided between the first flow passage and the second flow passage. The second flow passage is provided in a position that is not on the extension of the first flow passage.