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公开(公告)号：US12027564B2
公开(公告)日：2024-07-02
申请号：US17480158
申请日：2021-09-21
Applicant: FUJIFILM CORPORATION
Inventor： Shinichi Ushikura , Hisao Fujiwara , Tatsunori Tanimoto , Keiichi Akamatsu
IPC: H01L31/18 , H01L27/146
CPC classification number: H01L27/1469 , H01L27/14663 , H01L31/1896
Abstract: A method of manufacturing a radiographic imaging apparatus, including: providing a flexible base material on a support body and forming a substrate in which pixels are provided in a pixel region of a first surface of the base material; providing a terminal portion for connecting a cable on the first surface; connecting a circuit board for reading the electric charges from the pixels or driving the pixels to the terminal portion via the cable; peeling the substrate from the support body; and using a transport jig including a suction unit having suction members and a holding part having a holding member, to suction and support the first surface or a second surface opposite to the first surface with the suction members, and transporting the substrate peeled from the support body in a state where the circuit board is held by the holding member.
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公开(公告)号：US11802981B2
公开(公告)日：2023-10-31
申请号：US17394407
申请日：2021-08-05
Applicant: FUJIFILM CORPORATION
Inventor： Shinichi Ushikura , Munetaka Kato , Keiichi Akamatsu , Haruyasu Nakatsugawa
IPC: G01T1/202 , A61B6/00 , H01L27/146
CPC classification number: G01T1/202 , A61B6/00 , H01L27/14658 , H01L27/14689
Abstract: A method of manufacturing a radiation detector includes: forming a substrate in which a flexible base material is provided via a peeling layer on a support body and plural pixels that accumulate electric charges generated in response to light converted from radiation are provided in a pixel region of the base material; forming a conversion layer for converting the radiation into light on a surface of the base material; providing a first reinforcing substrate on a surface of the conversion layer opposite to a surface on the substrate side; peeling the substrate provided with the conversion layer and the first reinforcing substrate from the support body; providing a second reinforcing substrate on a surface of the substrate peeled from the support body; and peeling the first reinforcing substrate from the substrate provided with the conversion layer after providing the second reinforcing substrate.
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3.发明授权公开(公告)号：US11609347B2
公开(公告)日：2023-03-21
申请号：US17018225
申请日：2020-09-11
Applicant: FUJIFILM Corporation
Inventor： Naoto Iwakiri , Munetaka Kato , Haruyasu Nakatsugawa , Keiichi Akamatsu
Abstract: A radiation detector includes a flexible substrate, plural pixels provided on the substrate and each including a photoelectric conversion element, a scintillator stacked on the substrate, and a bending suppression member configured to suppress bending of the substrate. The bending suppression member has a rigidity that satisfies R≥X2/2ZL wherein X is a pixel size, ZL is a critical deformation amount of the pixel through bending of the substrate, and R is a radius of curvature of bending occurring in the substrate due to the weight of the scintillator.
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公开(公告)号：US10989818B2
公开(公告)日：2021-04-27
申请号：US16369781
申请日：2019-03-29
Applicant: FUJIFILM Corporation
Inventor： Shinichi Ushikura , Keiichi Akamatsu , Haruyasu Nakatsugawa , Shunsuke Kodaira
Abstract: A radiation detector includes: a sensor substrate including a flexible base material and a layer which is provided on a first surface of the base material and in which plural pixels, which accumulate electrical charges generated in accordance with light converted from radiation, are formed; a conversion layer that is provided on the first surface side of the sensor substrate to convert radiation into the light; and a protective film that covers a portion ranging from an opposite surface of the conversion layer opposite to a side where the sensor substrate is provided, to a corresponding position, corresponding to a position of an end part of the conversion layer, on a second surface opposite to the first surface of the base material.
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公开(公告)号：US11624716B2
公开(公告)日：2023-04-11
申请号：US17025098
申请日：2020-09-18
Applicant: FUJIFILM Corporation
Inventor： Shinichi Ushikura , Munetaka Kato , Haruyasu Nakatsugawa , Keiichi Akamatsu
Abstract: A radiation detector including: a sensor substrate including a flexible base member and a layer provided on a first surface of the base member and formed with plural pixels that accumulates electrical charge generated in response to light converted from radiation; a conversion layer provided on the first surface side of the sensor substrate, the conversion layer converts radiation into the light; and an elastic layer provided on the opposite side of the conversion layer to a side provided with the sensor substrate, the elastic layer having a greater restoring force with respect to bending than the sensor substrate.
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Patent Agency Ranking
公开(公告)号：US10534098B2
公开(公告)日：2020-01-14
申请号：US15890372
申请日：2018-02-07
Applicant: FUJIFILM Corporation
Inventor： Keiichi Akamatsu , Shinichi Ushikura , Takeya Meguro , Haruyasu Nakatsugawa
Abstract: A radiographic imaging apparatus includes a sensor board including a flexible substrate, and a plurality of pixels that are provided on a first surface of the substrate to accumulate electrical charges generated in accordance with light converted from radiation. Additionally, the radiographic imaging apparatus includes flexible cables having one ends electrically connected to the sensor board and the other ends provided with connectors, and flexible cables on which signal processing circuit parts are mounted and which are connected electrically to the cables by the one ends thereof being electrically connected to the connectors. Additionally, the radiographic imaging apparatus includes flexible cables having one ends electrically connected to the sensor board and the other ends provided with connectors, and flexible cables on which drive circuit parts are mounted and which are connected electrically to the cables by the one ends thereof being electrically connected to the connectors.
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公开(公告)号：US11786194B2
公开(公告)日：2023-10-17
申请号：US17025566
申请日：2020-09-18
Applicant: FUJIFILM Corporation
Inventor： Yoshihiro Okada , Keiichi Akamatsu , Shinichi Ushikura , Munetaka Kato , Haruyasu Nakatsugawa
CPC classification number: A61B6/4233 , A61B6/4208 , A61B6/4283 , A61B6/54 , G01T1/161 , G01T1/20 , G01T1/2002 , G01T1/2006 , G01T1/2018 , G01T1/20183 , G01T1/20184 , G01T1/20186 , G01T1/20188
Abstract: A radiation detector including: a substrate formed with plural pixels that accumulate electrical charges generated in response to light converted from radiation in a pixel region at an opposite-side surface of a base member to a surface including a fine particle layer; the base member being flexible and is made of resin and that includes a fine particle layer containing inorganic fine particles having a mean particle size of from 0.05 μm to 2.5 μm, a conversion layer provided at the surface of the base member provided with the pixel region and configured to convert the radiation into light; and a reinforcement substrate provided to at least one out of a surface on the substrate side of a stacked body configured by stacking the substrate and the conversion layer, or a surface on the conversion layer side of the stacked body.
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公开(公告)号：US11428827B2
公开(公告)日：2022-08-30
申请号：US17320241
申请日：2021-05-14
Applicant: FUJIFILM CORPORATION
Inventor： Shinichi Ushikura , Munetaka Kato , Keiichi Akamatsu , Haruyasu Nakatsugawa
IPC: H01L31/115 , G01T1/29 , G01T1/161
Abstract: Provided are a radiation detector, a radiographic imaging apparatus, and a manufacturing method that include a TFT substrate in which a plurality of pixels that accumulate electric charges generated depending on light converted from radiation are formed in a pixel region of a first surface of a flexible base material and a terminal region of the first surface is provided with a terminal for electrically connecting a flexible cable; a conversion layer that is provided outside the terminal region on the first surface of the base material to convert the radiation into light; a first reinforcing substrate that is provided on a surface of the conversion layer opposite to a surface on a TFT substrate side and has a higher stiffness than the base material; and a second reinforcing substrate that is provided on a second surface of the base material opposite to the first surface to cover a surface larger than the first reinforcing substrate, and that are capable of suppressing that a defect occurs in the substrate and have an excellent peeling property in a reworking process.
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公开(公告)号：US10502848B2
公开(公告)日：2019-12-10
申请号：US15890372
申请日：2018-02-07
Applicant: FUJIFILM Corporation
Inventor： Keiichi Akamatsu , Shinichi Ushikura , Takeya Meguro , Haruyasu Nakatsugawa
Abstract: A radiographic imaging apparatus includes a sensor board including a flexible substrate, and a plurality of pixels that are provided on a first surface of the substrate to accumulate electrical charges generated in accordance with light converted from radiation. Additionally, the radiographic imaging apparatus includes flexible cables having one ends electrically connected to the sensor board and the other ends provided with connectors, and flexible cables on which signal processing circuit parts are mounted and which are connected electrically to the cables by the one ends thereof being electrically connected to the connectors. Additionally, the radiographic imaging apparatus includes flexible cables having one ends electrically connected to the sensor board and the other ends provided with connectors, and flexible cables on which drive circuit parts are mounted and which are connected electrically to the cables by the one ends thereof being electrically connected to the connectors.
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公开(公告)号：US11735622B2
公开(公告)日：2023-08-22
申请号：US17485525
申请日：2021-09-27
Applicant: FUJIFILM CORPORATION
Inventor： Shinichi Ushikura , Naoto Iwakiri , Keiichi Akamatsu
IPC: H01L27/146 , G01T1/20 , A61B6/00
CPC classification number: H01L27/14663 , A61B6/00 , G01T1/20 , G01T1/20183 , G01T1/20184 , G01T1/20188 , H01L27/14636 , H01L27/14658
Abstract: A radiographic imaging apparatus including: a sensor substrate in which pixels are formed in a first surface of a base material; a conversion layer provided on the first surface; a signal processing substrate provided on one side the sensor substrate and includes at least a part of a signal processing unit; a driving substrate provided on the one side or the other side of the sensor substrate and includes at least a part of a drive unit; a first cable of which one end is connected to the sensor substrate and the other end is electrically connected to the signal processing substrate; and a second cable of which one end is connected to the sensor substrate, and passes through the first surface side or a second surface side of the base material and the other end is connected to the driving substrate.
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