公开(公告)号：US20250110069A1

公开(公告)日：2025-04-03

申请号：US18478593

申请日：2023-09-29

Applicant: FEI Company

Inventor： Radovan VAŠINA ,  Branislav STRAKA ,  Jakub HOLZER

IPC: G01N23/20025 ,  G01N23/20058 ,  G01N23/203

Abstract: In some embodiments, a scientific instrument includes a manipulator configured to controllably rotate a sample, an electron-beam column configured to direct an electron beam to a selected impact point on the sample; and a detector configurable to detect an angularly resolved pattern and a flux of back-scattered electrons. The scientific instrument also includes an electronic controller configured to: determine a first crystal orientation of the sample based on the angularly resolved pattern acquired when the electron-beam column is operated to keep the electron beam fixed at the impact point; operate the manipulator to place the sample into a second crystal orientation in which an angular difference between the determined first crystal orientation and a target crystal orientation is estimated to be canceled; and determine the second crystal orientation based on an SACP acquired when the electron-beam column is operated to rock the electron beam at the impact point.