公开(公告)号：US20240429018A1

公开(公告)日：2024-12-26

申请号：US18828805

申请日：2024-09-09

Applicant: FEI Company

Inventor： Garrett BUDNIK ,  Chengge JIAO ,  Mostafa MAAZOUZ ,  Suzanna OFFICER ,  Galen GLEDHILL ,  Chad RUE

IPC: H01J37/147 ,  H01J37/26

Abstract: Methods and systems for imaging a sample with a charged particle microscope comprises after scanning a region of interest (ROI) of a sample with an electron beam and acquiring X-rays emitted from the sample, scanning the ROI with an ion beam and acquiring ion-induced photons emitted from the sample. A spatial distribution of multiple elements in the sample may be determined based on both the acquired X-rays and the acquired ion-induced photons.

公开(公告)号：US20230095798A1

公开(公告)日：2023-03-30

申请号：US17490412

申请日：2021-09-30

Applicant: FEI Company

Inventor： Garrett BUDNIK ,  Chengge JIAO ,  Mostafa MAAZOUZ ,  Suzanna OFFICER ,  Galen Gledhill ,  Chad Rue

IPC: H01J37/147 ,  H01J37/26

Abstract: Methods and systems for imaging a sample with a charged particle microscope comprises after scanning a region of interest (ROI) of a sample with an electron beam and acquiring X-rays emitted from the sample, scanning the ROI with an ion beam and acquiring ion-induced photons emitted from the sample. A spatial distribution of multiple elements in the sample may be determined based on both the acquired X-rays and the acquired ion-induced photons.