公开(公告)号：US20230335371A1

公开(公告)日：2023-10-19

申请号：US18134528

申请日：2023-04-13

申请人： FEI Company

发明人： Lukáš Malý ,  Jaroslav Pavliš ,  Jan Klusácek ,  Lukáš Brínek

IPC分类号： H01J37/24 ,  H01J37/28 ,  G06T5/00 ,  G06T7/30 ,  G06T5/50 ,  G06T3/00

CPC分类号： H01J37/24 ,  G06T3/0068 ,  G06T5/001 ,  G06T5/50 ,  G06T7/30 ,  H01J37/28 ,  G06T2207/10061 ,  H01J2237/221

摘要： The present invention relates to a method and a system for compensating interference in a charged particle beam microscopy system. A step of capturing data obtained from irradiation of a sample for a sampling duration can be implemented. In the system a respective data storage is provided for capturing and/or storing this data. Further steps of dividing at least representative parts of the sampling duration into time-windows and constructing, for each of the time-windows, an intermediate image, can be implemented. Detecting shift between the intermediate images and determining a compensation function for the shift between the intermediate images is realized as well. In a system the latter steps are automated by a respective processing component. The shift between intermediate images can be a two-dimensional shift and the compensation function represents a shift of the intermediate images in the two dimensions over time.