公开(公告)号：US20230341942A1

公开(公告)日：2023-10-26

申请号：US18304148

申请日：2023-04-20

Applicant: Electronics and Telecommunications Research Institute

Inventor： Sung Q LEE ,  Kang Ho PARK ,  You Sung KANG

IPC: G06F3/01 ,  A61N1/36 ,  G06T17/00

CPC classification number: G06F3/016 ,  A61N1/3614 ,  A61N1/3606 ,  G06T17/00

Abstract: The present disclosure relates to a tactile emotion recognition method and device, and is directed to assigning an impedance value to each object in a virtual space; inducing virtual force using displacement between the object and a user's body in the virtual space; inducing a signal, which causes a signal of a sensory nerve to be fired, with a value corresponding to the virtual force; stimulating a location where the sensory nerve is located temporarily or over time; and generating feedback in the virtual space based on a stimulation result.

公开(公告)号：US20130244365A1

公开(公告)日：2013-09-19

申请号：US13791039

申请日：2013-03-08

Applicant: Electronics and Telecommunications Research Institute

Inventor： Hye Jin KIM ,  Sung Q LEE ,  Kang Ho PARK ,  Jong Dae KIM

IPC: H04R31/00

CPC classification number: H04R31/003 ,  H04R19/005 ,  H04R31/00 ,  H04R2499/11

Abstract: A condenser microphone having a flexure hinge diaphragm and a method of manufacturing the same are provided. The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer on the first insulating layer; forming sound holes by patterning the upper silicon layer; forming a second insulating layer and a conductive layer on the upper silicon layer; forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the layers to form an air gap between the diaphragm and the upper silicon layer. Consequently, a manufacturing process may improve the sensitivity and reduce the size of the condenser microphone.

Abstract translation: 提供一种具有挠性铰链膜片的电容麦克风及其制造方法。 该方法包括以下步骤：形成下硅层和第一绝缘层; 在所述第一绝缘层上形成上硅层; 通过图案化上硅层形成声孔; 在上硅层上形成第二绝缘层和导电层; 在导电层上形成钝化层; 在钝化层上形成牺牲层; 在牺牲层上沉积隔膜，并形成穿过隔膜的气孔; 在所述钝化层上形成电极焊盘和所述隔膜的区域; 并蚀刻各层以在隔膜和上硅层之间形成气隙。 因此，制造工艺可以提高电容传声器的灵敏度和减小尺寸。