公开(公告)号：US12007744B2

公开(公告)日：2024-06-11

申请号：US17264204

申请日：2019-08-05

申请人： Edwards Japan Limited ,  Edwards Limited

发明人： Kobayashi Kenichiro ,  Adrian Fisher ,  Christopher Peter Jones ,  Philip Carr

IPC分类号： G05B19/4063 ,  G05B19/18 ,  G05B19/4067 ,  G05B19/4093 ,  H01L21/02

CPC分类号： G05B19/4063 ,  G05B19/182 ,  G05B19/4067 ,  G05B19/40938 ,  H01L21/02337 ,  G05B2219/2231 ,  G05B2219/2234 ,  G05B2219/2602

摘要： A plurality of system control devices respectively include network interfaces for communicating with each other via a network. One of the plurality of system control devices functions as a master system control device, and the remaining system control devices function as slave system control devices. The master system control device transmits a control command to the slave system control devices by means of the network interface. The slave system control devices receive the control command by means of the network interfaces and supply an operation command to abatement devices in accordance with the control command. When unable to communicate with the master system control device, the slave system control devices either function as master system control devices or enter stand-alone operation mode.

公开(公告)号：US20210302935A1

公开(公告)日：2021-09-30

申请号：US17264204

申请日：2019-08-05

申请人： Edwards Japan Limited ,  Edwards Limited

发明人： Kobayashi Kenichiro ,  Adrian Fisher ,  Christopher Peter Jones ,  Philip Carr

IPC分类号： G05B19/4063 ,  G05B19/4067 ,  G05B19/4093 ,  G05B19/18 ,  H01L21/02

摘要： A plurality of system control devices respectively include network interfaces for communicating with each other via a network. One of the plurality of system control devices functions as a master system control device, and the remaining system control devices function as slave system control devices. The master system control device transmits a control command to the slave system control devices by means of the network interface. The slave system control devices receive the control command by means of the network interfaces and supply an operation command to abatement devices in accordance with the control command. When unable to communicate with the master system control device, the slave system control devices either function as master system control devices or enter stand-alone operation mode.